12/6/2012	9:48:47 AM	Tube furnace set to 200
12/6/2012	9:57:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2012	9:57:08 AM	Recipe started at 9:57 AM
12/6/2012	9:57:08 AM	Helium valve closed
12/6/2012	9:57:08 AM	H2 valve closed
12/6/2012	9:57:08 AM	BCl3 valve closed
12/6/2012	9:57:08 AM	PH3 valve closed
12/6/2012	9:57:08 AM	SiCl4 pre valve closed
12/6/2012	9:57:08 AM	SiCl4 post valve closed
12/6/2012	9:57:08 AM	Main Vac valve closed
12/6/2012	9:57:08 AM	Bypass valve closed
12/6/2012	9:57:08 AM	Bubbler valve closed
12/6/2012	9:57:08 AM	Helium MFC set to  0.000000
12/6/2012	9:57:08 AM	H2 MFC set to  0.000000
12/6/2012	9:57:08 AM	BCl3 MFC set to  0.000000
12/6/2012	9:57:08 AM	PH3 MFC set to  0.000000
12/6/2012	9:57:08 AM	SiCl4 MFC set to  0.000000
12/6/2012	9:57:08 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	9:57:09 AM	Tube furnace set to 0
12/6/2012	9:57:12 AM	H2 valve closed
12/6/2012	9:57:12 AM	BCl3 valve closed
12/6/2012	9:57:12 AM	PH3 valve closed
12/6/2012	9:57:12 AM	SiCl4 pre valve closed
12/6/2012	9:57:12 AM	SiCl4 post valve closed
12/6/2012	9:57:12 AM	Main Vac valve closed
12/6/2012	9:57:12 AM	Bypass valve closed
12/6/2012	9:57:12 AM	Bubbler valve closed
12/6/2012	9:57:12 AM	Helium valve opened
12/6/2012	9:57:12 AM	Helium MFC set to  500.000000
12/6/2012	9:57:12 AM	H2 MFC set to  0.000000
12/6/2012	9:57:12 AM	BCl3 MFC set to  0.000000
12/6/2012	9:57:12 AM	PH3 MFC set to  0.000000
12/6/2012	9:57:12 AM	SiCl4 MFC set to  0.000000
12/6/2012	9:57:12 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	9:57:12 AM	Tube furnace set to 0
12/6/2012	9:58:19 AM	Helium valve closed
12/6/2012	9:58:19 AM	H2 valve closed
12/6/2012	9:58:19 AM	BCl3 valve closed
12/6/2012	9:58:19 AM	PH3 valve closed
12/6/2012	9:58:19 AM	SiCl4 pre valve closed
12/6/2012	9:58:19 AM	SiCl4 post valve closed
12/6/2012	9:58:19 AM	Main Vac valve closed
12/6/2012	9:58:19 AM	Bypass valve closed
12/6/2012	9:58:19 AM	Bubbler valve closed
12/6/2012	9:58:19 AM	Helium MFC set to  0.000000
12/6/2012	9:58:19 AM	H2 MFC set to  0.000000
12/6/2012	9:58:19 AM	BCl3 MFC set to  0.000000
12/6/2012	9:58:19 AM	PH3 MFC set to  0.000000
12/6/2012	9:58:19 AM	SiCl4 MFC set to  0.000000
12/6/2012	9:58:19 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	9:58:19 AM	Tube furnace set to 0
12/6/2012	9:58:20 AM	Run finished at 9:58 AM
12/6/2012	9:58:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2012	10:03:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/6/2012	10:03:43 AM	Recipe started at 10:03 AM
12/6/2012	10:03:43 AM	Helium valve closed
12/6/2012	10:03:43 AM	H2 valve closed
12/6/2012	10:03:43 AM	BCl3 valve closed
12/6/2012	10:03:43 AM	PH3 valve closed
12/6/2012	10:03:43 AM	SiCl4 pre valve closed
12/6/2012	10:03:43 AM	SiCl4 post valve closed
12/6/2012	10:03:43 AM	Main Vac valve closed
12/6/2012	10:03:43 AM	Bubbler valve closed
12/6/2012	10:03:43 AM	Bypass valve opened
12/6/2012	10:03:43 AM	Helium MFC set to  0.000000
12/6/2012	10:03:43 AM	H2 MFC set to  0.000000
12/6/2012	10:03:43 AM	BCl3 MFC set to  0.000000
12/6/2012	10:03:43 AM	PH3 MFC set to  0.000000
12/6/2012	10:03:43 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:03:43 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:03:43 AM	Tube furnace set to 0
12/6/2012	10:05:03 AM	Helium valve closed
12/6/2012	10:05:03 AM	H2 valve closed
12/6/2012	10:05:03 AM	BCl3 valve closed
12/6/2012	10:05:03 AM	PH3 valve closed
12/6/2012	10:05:03 AM	SiCl4 pre valve closed
12/6/2012	10:05:03 AM	SiCl4 post valve closed
12/6/2012	10:05:03 AM	Main Vac valve closed
12/6/2012	10:05:03 AM	Bubbler valve closed
12/6/2012	10:05:03 AM	Bypass valve opened
12/6/2012	10:05:03 AM	Helium MFC set to  0.000000
12/6/2012	10:05:03 AM	H2 MFC set to  0.000000
12/6/2012	10:05:03 AM	BCl3 MFC set to  0.000000
12/6/2012	10:05:03 AM	PH3 MFC set to  0.000000
12/6/2012	10:05:03 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:05:03 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:05:03 AM	Tube furnace set to 0
12/6/2012	10:06:03 AM	Helium valve closed
12/6/2012	10:06:03 AM	H2 valve closed
12/6/2012	10:06:03 AM	BCl3 valve closed
12/6/2012	10:06:03 AM	PH3 valve closed
12/6/2012	10:06:03 AM	SiCl4 pre valve closed
12/6/2012	10:06:03 AM	SiCl4 post valve closed
12/6/2012	10:06:03 AM	Bypass valve closed
12/6/2012	10:06:03 AM	Bubbler valve closed
12/6/2012	10:06:03 AM	Main Vac valve opened
12/6/2012	10:06:03 AM	Helium MFC set to  0.000000
12/6/2012	10:06:03 AM	H2 MFC set to  0.000000
12/6/2012	10:06:03 AM	BCl3 MFC set to  0.000000
12/6/2012	10:06:03 AM	PH3 MFC set to  0.000000
12/6/2012	10:06:03 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:06:03 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:06:04 AM	Tube furnace set to 0
12/6/2012	10:06:05 AM	Run finished at 10:06 AM
12/6/2012	10:06:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/6/2012	10:32:59 AM	Recipe started at 10:32 AM
12/6/2012	10:32:59 AM	Helium valve closed
12/6/2012	10:32:59 AM	H2 valve closed
12/6/2012	10:32:59 AM	BCl3 valve closed
12/6/2012	10:32:59 AM	PH3 valve closed
12/6/2012	10:32:59 AM	SiCl4 pre valve closed
12/6/2012	10:32:59 AM	SiCl4 post valve closed
12/6/2012	10:32:59 AM	Bypass valve closed
12/6/2012	10:32:59 AM	Bubbler valve closed
12/6/2012	10:32:59 AM	Main Vac valve opened
12/6/2012	10:32:59 AM	Helium MFC set to  0.000000
12/6/2012	10:32:59 AM	H2 MFC set to  0.000000
12/6/2012	10:32:59 AM	BCl3 MFC set to  0.000000
12/6/2012	10:32:59 AM	PH3 MFC set to  0.000000
12/6/2012	10:32:59 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:32:59 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:32:59 AM	Tube furnace set to 150
12/6/2012	10:33:00 AM	H2 valve closed
12/6/2012	10:33:00 AM	BCl3 valve closed
12/6/2012	10:33:00 AM	PH3 valve closed
12/6/2012	10:33:00 AM	SiCl4 pre valve closed
12/6/2012	10:33:00 AM	SiCl4 post valve closed
12/6/2012	10:33:00 AM	Bypass valve closed
12/6/2012	10:33:00 AM	Bubbler valve closed
12/6/2012	10:33:00 AM	Helium valve opened
12/6/2012	10:33:00 AM	Main Vac valve opened
12/6/2012	10:33:00 AM	Helium MFC set to  20.000000
12/6/2012	10:33:00 AM	H2 MFC set to  0.000000
12/6/2012	10:33:00 AM	BCl3 MFC set to  0.000000
12/6/2012	10:33:00 AM	PH3 MFC set to  0.000000
12/6/2012	10:33:00 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:33:00 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:33:01 AM	Tube furnace set to 150
12/6/2012	10:33:31 AM	Helium valve closed
12/6/2012	10:33:31 AM	H2 valve closed
12/6/2012	10:33:31 AM	BCl3 valve closed
12/6/2012	10:33:31 AM	PH3 valve closed
12/6/2012	10:33:31 AM	SiCl4 pre valve closed
12/6/2012	10:33:31 AM	SiCl4 post valve closed
12/6/2012	10:33:31 AM	Bypass valve closed
12/6/2012	10:33:31 AM	Bubbler valve closed
12/6/2012	10:33:31 AM	Main Vac valve opened
12/6/2012	10:33:31 AM	Helium MFC set to  0.000000
12/6/2012	10:33:31 AM	H2 MFC set to  0.000000
12/6/2012	10:33:31 AM	BCl3 MFC set to  0.000000
12/6/2012	10:33:31 AM	PH3 MFC set to  0.000000
12/6/2012	10:33:31 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:33:31 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:33:31 AM	Tube furnace set to 150
12/6/2012	10:34:01 AM	H2 valve closed
12/6/2012	10:34:01 AM	BCl3 valve closed
12/6/2012	10:34:01 AM	PH3 valve closed
12/6/2012	10:34:01 AM	SiCl4 pre valve closed
12/6/2012	10:34:01 AM	SiCl4 post valve closed
12/6/2012	10:34:01 AM	Bypass valve closed
12/6/2012	10:34:01 AM	Bubbler valve closed
12/6/2012	10:34:01 AM	Helium valve opened
12/6/2012	10:34:01 AM	Main Vac valve opened
12/6/2012	10:34:01 AM	Helium MFC set to  20.000000
12/6/2012	10:34:01 AM	H2 MFC set to  0.000000
12/6/2012	10:34:01 AM	BCl3 MFC set to  0.000000
12/6/2012	10:34:01 AM	PH3 MFC set to  0.000000
12/6/2012	10:34:01 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:34:01 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:34:01 AM	Tube furnace set to 150
12/6/2012	10:34:31 AM	Helium valve closed
12/6/2012	10:34:31 AM	H2 valve closed
12/6/2012	10:34:31 AM	BCl3 valve closed
12/6/2012	10:34:31 AM	PH3 valve closed
12/6/2012	10:34:31 AM	SiCl4 pre valve closed
12/6/2012	10:34:31 AM	SiCl4 post valve closed
12/6/2012	10:34:31 AM	Bypass valve closed
12/6/2012	10:34:31 AM	Bubbler valve closed
12/6/2012	10:34:31 AM	Main Vac valve opened
12/6/2012	10:34:31 AM	Helium MFC set to  0.000000
12/6/2012	10:34:31 AM	H2 MFC set to  0.000000
12/6/2012	10:34:31 AM	BCl3 MFC set to  0.000000
12/6/2012	10:34:31 AM	PH3 MFC set to  0.000000
12/6/2012	10:34:31 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:34:31 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:34:31 AM	Tube furnace set to 150
12/6/2012	10:35:01 AM	H2 valve closed
12/6/2012	10:35:01 AM	BCl3 valve closed
12/6/2012	10:35:01 AM	PH3 valve closed
12/6/2012	10:35:01 AM	SiCl4 pre valve closed
12/6/2012	10:35:01 AM	SiCl4 post valve closed
12/6/2012	10:35:01 AM	Bypass valve closed
12/6/2012	10:35:01 AM	Bubbler valve closed
12/6/2012	10:35:01 AM	Helium valve opened
12/6/2012	10:35:01 AM	Main Vac valve opened
12/6/2012	10:35:01 AM	Helium MFC set to  20.000000
12/6/2012	10:35:01 AM	H2 MFC set to  0.000000
12/6/2012	10:35:01 AM	BCl3 MFC set to  0.000000
12/6/2012	10:35:01 AM	PH3 MFC set to  0.000000
12/6/2012	10:35:01 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:35:01 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:35:02 AM	Tube furnace set to 150
12/6/2012	10:35:32 AM	Helium valve closed
12/6/2012	10:35:32 AM	H2 valve closed
12/6/2012	10:35:32 AM	BCl3 valve closed
12/6/2012	10:35:32 AM	PH3 valve closed
12/6/2012	10:35:32 AM	SiCl4 pre valve closed
12/6/2012	10:35:32 AM	SiCl4 post valve closed
12/6/2012	10:35:32 AM	Bypass valve closed
12/6/2012	10:35:32 AM	Bubbler valve closed
12/6/2012	10:35:32 AM	Main Vac valve opened
12/6/2012	10:35:32 AM	Helium MFC set to  0.000000
12/6/2012	10:35:32 AM	H2 MFC set to  0.000000
12/6/2012	10:35:32 AM	BCl3 MFC set to  0.000000
12/6/2012	10:35:32 AM	PH3 MFC set to  0.000000
12/6/2012	10:35:32 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:35:32 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:35:32 AM	Tube furnace set to 150
12/6/2012	10:36:02 AM	H2 valve closed
12/6/2012	10:36:02 AM	BCl3 valve closed
12/6/2012	10:36:02 AM	PH3 valve closed
12/6/2012	10:36:02 AM	SiCl4 pre valve closed
12/6/2012	10:36:02 AM	SiCl4 post valve closed
12/6/2012	10:36:02 AM	Bypass valve closed
12/6/2012	10:36:02 AM	Bubbler valve closed
12/6/2012	10:36:02 AM	Helium valve opened
12/6/2012	10:36:02 AM	Main Vac valve opened
12/6/2012	10:36:02 AM	Helium MFC set to  20.000000
12/6/2012	10:36:02 AM	H2 MFC set to  0.000000
12/6/2012	10:36:02 AM	BCl3 MFC set to  0.000000
12/6/2012	10:36:02 AM	PH3 MFC set to  0.000000
12/6/2012	10:36:02 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:36:02 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:36:02 AM	Tube furnace set to 150
12/6/2012	10:36:32 AM	Helium valve closed
12/6/2012	10:36:32 AM	H2 valve closed
12/6/2012	10:36:32 AM	BCl3 valve closed
12/6/2012	10:36:32 AM	PH3 valve closed
12/6/2012	10:36:32 AM	SiCl4 pre valve closed
12/6/2012	10:36:32 AM	SiCl4 post valve closed
12/6/2012	10:36:32 AM	Bypass valve closed
12/6/2012	10:36:32 AM	Bubbler valve closed
12/6/2012	10:36:32 AM	Main Vac valve opened
12/6/2012	10:36:32 AM	Helium MFC set to  0.000000
12/6/2012	10:36:32 AM	H2 MFC set to  0.000000
12/6/2012	10:36:32 AM	BCl3 MFC set to  0.000000
12/6/2012	10:36:32 AM	PH3 MFC set to  0.000000
12/6/2012	10:36:32 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:36:32 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:36:32 AM	Tube furnace set to 150
12/6/2012	10:37:02 AM	H2 valve closed
12/6/2012	10:37:02 AM	BCl3 valve closed
12/6/2012	10:37:02 AM	PH3 valve closed
12/6/2012	10:37:02 AM	SiCl4 pre valve closed
12/6/2012	10:37:02 AM	SiCl4 post valve closed
12/6/2012	10:37:02 AM	Bypass valve closed
12/6/2012	10:37:02 AM	Bubbler valve closed
12/6/2012	10:37:02 AM	Helium valve opened
12/6/2012	10:37:02 AM	Main Vac valve opened
12/6/2012	10:37:02 AM	Helium MFC set to  20.000000
12/6/2012	10:37:02 AM	H2 MFC set to  0.000000
12/6/2012	10:37:02 AM	BCl3 MFC set to  0.000000
12/6/2012	10:37:02 AM	PH3 MFC set to  0.000000
12/6/2012	10:37:02 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:37:02 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:37:03 AM	Tube furnace set to 150
12/6/2012	10:37:33 AM	Helium valve closed
12/6/2012	10:37:33 AM	H2 valve closed
12/6/2012	10:37:33 AM	BCl3 valve closed
12/6/2012	10:37:33 AM	PH3 valve closed
12/6/2012	10:37:33 AM	SiCl4 pre valve closed
12/6/2012	10:37:33 AM	SiCl4 post valve closed
12/6/2012	10:37:33 AM	Bypass valve closed
12/6/2012	10:37:33 AM	Bubbler valve closed
12/6/2012	10:37:33 AM	Main Vac valve opened
12/6/2012	10:37:33 AM	Helium MFC set to  0.000000
12/6/2012	10:37:33 AM	H2 MFC set to  0.000000
12/6/2012	10:37:33 AM	BCl3 MFC set to  0.000000
12/6/2012	10:37:33 AM	PH3 MFC set to  0.000000
12/6/2012	10:37:33 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:37:33 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:37:33 AM	Tube furnace set to 150
12/6/2012	10:38:03 AM	H2 valve closed
12/6/2012	10:38:03 AM	BCl3 valve closed
12/6/2012	10:38:03 AM	PH3 valve closed
12/6/2012	10:38:03 AM	SiCl4 pre valve closed
12/6/2012	10:38:03 AM	SiCl4 post valve closed
12/6/2012	10:38:03 AM	Bypass valve closed
12/6/2012	10:38:03 AM	Bubbler valve closed
12/6/2012	10:38:03 AM	Helium valve opened
12/6/2012	10:38:03 AM	Main Vac valve opened
12/6/2012	10:38:03 AM	Helium MFC set to  20.000000
12/6/2012	10:38:03 AM	H2 MFC set to  0.000000
12/6/2012	10:38:03 AM	BCl3 MFC set to  0.000000
12/6/2012	10:38:03 AM	PH3 MFC set to  0.000000
12/6/2012	10:38:03 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:38:03 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:38:03 AM	Tube furnace set to 150
12/6/2012	10:38:33 AM	Helium valve closed
12/6/2012	10:38:33 AM	H2 valve closed
12/6/2012	10:38:33 AM	BCl3 valve closed
12/6/2012	10:38:33 AM	PH3 valve closed
12/6/2012	10:38:33 AM	SiCl4 pre valve closed
12/6/2012	10:38:33 AM	SiCl4 post valve closed
12/6/2012	10:38:33 AM	Bypass valve closed
12/6/2012	10:38:33 AM	Bubbler valve closed
12/6/2012	10:38:33 AM	Main Vac valve opened
12/6/2012	10:38:33 AM	Helium MFC set to  0.000000
12/6/2012	10:38:33 AM	H2 MFC set to  0.000000
12/6/2012	10:38:33 AM	BCl3 MFC set to  0.000000
12/6/2012	10:38:33 AM	PH3 MFC set to  0.000000
12/6/2012	10:38:33 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:38:33 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:38:33 AM	Tube furnace set to 150
12/6/2012	10:39:03 AM	H2 valve closed
12/6/2012	10:39:03 AM	BCl3 valve closed
12/6/2012	10:39:03 AM	PH3 valve closed
12/6/2012	10:39:03 AM	SiCl4 pre valve closed
12/6/2012	10:39:03 AM	SiCl4 post valve closed
12/6/2012	10:39:03 AM	Bypass valve closed
12/6/2012	10:39:03 AM	Bubbler valve closed
12/6/2012	10:39:03 AM	Helium valve opened
12/6/2012	10:39:03 AM	Main Vac valve opened
12/6/2012	10:39:03 AM	Helium MFC set to  20.000000
12/6/2012	10:39:03 AM	H2 MFC set to  0.000000
12/6/2012	10:39:03 AM	BCl3 MFC set to  0.000000
12/6/2012	10:39:03 AM	PH3 MFC set to  0.000000
12/6/2012	10:39:03 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:39:03 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:39:03 AM	Tube furnace set to 150
12/6/2012	10:39:33 AM	Helium valve closed
12/6/2012	10:39:33 AM	H2 valve closed
12/6/2012	10:39:34 AM	BCl3 valve closed
12/6/2012	10:39:34 AM	PH3 valve closed
12/6/2012	10:39:34 AM	SiCl4 pre valve closed
12/6/2012	10:39:34 AM	SiCl4 post valve closed
12/6/2012	10:39:34 AM	Bypass valve closed
12/6/2012	10:39:34 AM	Bubbler valve closed
12/6/2012	10:39:34 AM	Main Vac valve opened
12/6/2012	10:39:34 AM	Helium MFC set to  0.000000
12/6/2012	10:39:34 AM	H2 MFC set to  0.000000
12/6/2012	10:39:34 AM	BCl3 MFC set to  0.000000
12/6/2012	10:39:34 AM	PH3 MFC set to  0.000000
12/6/2012	10:39:34 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:39:34 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:39:34 AM	Tube furnace set to 150
12/6/2012	10:40:04 AM	H2 valve closed
12/6/2012	10:40:04 AM	BCl3 valve closed
12/6/2012	10:40:04 AM	PH3 valve closed
12/6/2012	10:40:04 AM	SiCl4 pre valve closed
12/6/2012	10:40:04 AM	SiCl4 post valve closed
12/6/2012	10:40:04 AM	Bypass valve closed
12/6/2012	10:40:04 AM	Bubbler valve closed
12/6/2012	10:40:04 AM	Helium valve opened
12/6/2012	10:40:04 AM	Main Vac valve opened
12/6/2012	10:40:04 AM	Helium MFC set to  20.000000
12/6/2012	10:40:04 AM	H2 MFC set to  0.000000
12/6/2012	10:40:04 AM	BCl3 MFC set to  0.000000
12/6/2012	10:40:04 AM	PH3 MFC set to  0.000000
12/6/2012	10:40:04 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:40:04 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:40:04 AM	Tube furnace set to 150
12/6/2012	10:40:34 AM	Helium valve closed
12/6/2012	10:40:34 AM	H2 valve closed
12/6/2012	10:40:34 AM	BCl3 valve closed
12/6/2012	10:40:34 AM	PH3 valve closed
12/6/2012	10:40:34 AM	SiCl4 pre valve closed
12/6/2012	10:40:34 AM	SiCl4 post valve closed
12/6/2012	10:40:34 AM	Bypass valve closed
12/6/2012	10:40:34 AM	Bubbler valve closed
12/6/2012	10:40:34 AM	Main Vac valve opened
12/6/2012	10:40:34 AM	Helium MFC set to  0.000000
12/6/2012	10:40:34 AM	H2 MFC set to  0.000000
12/6/2012	10:40:34 AM	BCl3 MFC set to  0.000000
12/6/2012	10:40:34 AM	PH3 MFC set to  0.000000
12/6/2012	10:40:34 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:40:34 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:40:34 AM	Tube furnace set to 150
12/6/2012	10:41:04 AM	H2 valve closed
12/6/2012	10:41:04 AM	BCl3 valve closed
12/6/2012	10:41:04 AM	PH3 valve closed
12/6/2012	10:41:04 AM	SiCl4 pre valve closed
12/6/2012	10:41:04 AM	SiCl4 post valve closed
12/6/2012	10:41:04 AM	Bypass valve closed
12/6/2012	10:41:04 AM	Bubbler valve closed
12/6/2012	10:41:04 AM	Helium valve opened
12/6/2012	10:41:04 AM	Main Vac valve opened
12/6/2012	10:41:04 AM	Helium MFC set to  20.000000
12/6/2012	10:41:04 AM	H2 MFC set to  0.000000
12/6/2012	10:41:04 AM	BCl3 MFC set to  0.000000
12/6/2012	10:41:04 AM	PH3 MFC set to  0.000000
12/6/2012	10:41:04 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:41:04 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:41:04 AM	Tube furnace set to 150
12/6/2012	10:41:34 AM	Helium valve closed
12/6/2012	10:41:34 AM	H2 valve closed
12/6/2012	10:41:34 AM	BCl3 valve closed
12/6/2012	10:41:34 AM	PH3 valve closed
12/6/2012	10:41:34 AM	SiCl4 pre valve closed
12/6/2012	10:41:34 AM	SiCl4 post valve closed
12/6/2012	10:41:34 AM	Bypass valve closed
12/6/2012	10:41:34 AM	Bubbler valve closed
12/6/2012	10:41:34 AM	Main Vac valve opened
12/6/2012	10:41:34 AM	Helium MFC set to  0.000000
12/6/2012	10:41:35 AM	H2 MFC set to  0.000000
12/6/2012	10:41:35 AM	BCl3 MFC set to  0.000000
12/6/2012	10:41:35 AM	PH3 MFC set to  0.000000
12/6/2012	10:41:35 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:41:35 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:41:35 AM	Tube furnace set to 150
12/6/2012	10:42:05 AM	H2 valve closed
12/6/2012	10:42:05 AM	BCl3 valve closed
12/6/2012	10:42:05 AM	PH3 valve closed
12/6/2012	10:42:05 AM	SiCl4 pre valve closed
12/6/2012	10:42:05 AM	SiCl4 post valve closed
12/6/2012	10:42:05 AM	Bypass valve closed
12/6/2012	10:42:05 AM	Bubbler valve closed
12/6/2012	10:42:05 AM	Helium valve opened
12/6/2012	10:42:05 AM	Main Vac valve opened
12/6/2012	10:42:05 AM	Helium MFC set to  20.000000
12/6/2012	10:42:05 AM	H2 MFC set to  0.000000
12/6/2012	10:42:05 AM	BCl3 MFC set to  0.000000
12/6/2012	10:42:05 AM	PH3 MFC set to  0.000000
12/6/2012	10:42:05 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:42:05 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:42:05 AM	Tube furnace set to 150
12/6/2012	10:42:35 AM	Helium valve closed
12/6/2012	10:42:35 AM	H2 valve closed
12/6/2012	10:42:35 AM	BCl3 valve closed
12/6/2012	10:42:35 AM	PH3 valve closed
12/6/2012	10:42:35 AM	SiCl4 pre valve closed
12/6/2012	10:42:35 AM	SiCl4 post valve closed
12/6/2012	10:42:35 AM	Bypass valve closed
12/6/2012	10:42:35 AM	Bubbler valve closed
12/6/2012	10:42:35 AM	Main Vac valve opened
12/6/2012	10:42:35 AM	Helium MFC set to  0.000000
12/6/2012	10:42:35 AM	H2 MFC set to  0.000000
12/6/2012	10:42:35 AM	BCl3 MFC set to  0.000000
12/6/2012	10:42:35 AM	PH3 MFC set to  0.000000
12/6/2012	10:42:35 AM	SiCl4 MFC set to  0.000000
12/6/2012	10:42:35 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	10:42:35 AM	Tube furnace set to 150
12/6/2012	10:42:36 AM	Run finished at 10:42 AM
12/6/2012	11:09:40 AM	Main Vac valve closed
12/6/2012	11:09:55 AM	Main Vac valve opened
12/6/2012	11:10:08 AM	Recipe started at 11:10 AM
12/6/2012	11:10:08 AM	Helium valve closed
12/6/2012	11:10:08 AM	H2 valve closed
12/6/2012	11:10:08 AM	BCl3 valve closed
12/6/2012	11:10:08 AM	PH3 valve closed
12/6/2012	11:10:08 AM	SiCl4 pre valve closed
12/6/2012	11:10:08 AM	SiCl4 post valve closed
12/6/2012	11:10:08 AM	Bypass valve closed
12/6/2012	11:10:08 AM	Bubbler valve closed
12/6/2012	11:10:08 AM	Main Vac valve opened
12/6/2012	11:10:08 AM	Helium MFC set to  0.000000
12/6/2012	11:10:08 AM	H2 MFC set to  0.000000
12/6/2012	11:10:08 AM	BCl3 MFC set to  0.000000
12/6/2012	11:10:08 AM	PH3 MFC set to  0.000000
12/6/2012	11:10:08 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:10:08 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:10:08 AM	Tube furnace set to 150
12/6/2012	11:10:33 AM	H2 valve closed
12/6/2012	11:10:33 AM	BCl3 valve closed
12/6/2012	11:10:33 AM	PH3 valve closed
12/6/2012	11:10:33 AM	SiCl4 pre valve closed
12/6/2012	11:10:33 AM	SiCl4 post valve closed
12/6/2012	11:10:33 AM	Bypass valve closed
12/6/2012	11:10:33 AM	Bubbler valve closed
12/6/2012	11:10:33 AM	Helium valve opened
12/6/2012	11:10:33 AM	Main Vac valve opened
12/6/2012	11:10:33 AM	Helium MFC set to  20.000000
12/6/2012	11:10:33 AM	H2 MFC set to  0.000000
12/6/2012	11:10:33 AM	BCl3 MFC set to  0.000000
12/6/2012	11:10:33 AM	PH3 MFC set to  0.000000
12/6/2012	11:10:33 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:10:33 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:10:33 AM	Tube furnace set to 150
12/6/2012	11:11:03 AM	Helium valve closed
12/6/2012	11:11:03 AM	H2 valve closed
12/6/2012	11:11:03 AM	BCl3 valve closed
12/6/2012	11:11:03 AM	PH3 valve closed
12/6/2012	11:11:03 AM	SiCl4 pre valve closed
12/6/2012	11:11:03 AM	SiCl4 post valve closed
12/6/2012	11:11:03 AM	Bypass valve closed
12/6/2012	11:11:03 AM	Bubbler valve closed
12/6/2012	11:11:03 AM	Main Vac valve opened
12/6/2012	11:11:03 AM	Helium MFC set to  0.000000
12/6/2012	11:11:03 AM	H2 MFC set to  0.000000
12/6/2012	11:11:03 AM	BCl3 MFC set to  0.000000
12/6/2012	11:11:03 AM	PH3 MFC set to  0.000000
12/6/2012	11:11:03 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:11:03 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:11:03 AM	Tube furnace set to 150
12/6/2012	11:11:33 AM	H2 valve closed
12/6/2012	11:11:33 AM	BCl3 valve closed
12/6/2012	11:11:33 AM	PH3 valve closed
12/6/2012	11:11:33 AM	SiCl4 pre valve closed
12/6/2012	11:11:33 AM	SiCl4 post valve closed
12/6/2012	11:11:33 AM	Bypass valve closed
12/6/2012	11:11:33 AM	Bubbler valve closed
12/6/2012	11:11:33 AM	Helium valve opened
12/6/2012	11:11:33 AM	Main Vac valve opened
12/6/2012	11:11:33 AM	Helium MFC set to  20.000000
12/6/2012	11:11:33 AM	H2 MFC set to  0.000000
12/6/2012	11:11:33 AM	BCl3 MFC set to  0.000000
12/6/2012	11:11:33 AM	PH3 MFC set to  0.000000
12/6/2012	11:11:33 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:11:33 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:11:34 AM	Tube furnace set to 150
12/6/2012	11:12:04 AM	Helium valve closed
12/6/2012	11:12:04 AM	H2 valve closed
12/6/2012	11:12:04 AM	BCl3 valve closed
12/6/2012	11:12:04 AM	PH3 valve closed
12/6/2012	11:12:04 AM	SiCl4 pre valve closed
12/6/2012	11:12:04 AM	SiCl4 post valve closed
12/6/2012	11:12:04 AM	Bypass valve closed
12/6/2012	11:12:04 AM	Bubbler valve closed
12/6/2012	11:12:04 AM	Main Vac valve opened
12/6/2012	11:12:04 AM	Helium MFC set to  0.000000
12/6/2012	11:12:04 AM	H2 MFC set to  0.000000
12/6/2012	11:12:04 AM	BCl3 MFC set to  0.000000
12/6/2012	11:12:04 AM	PH3 MFC set to  0.000000
12/6/2012	11:12:04 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:12:04 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:12:04 AM	Tube furnace set to 150
12/6/2012	11:12:34 AM	H2 valve closed
12/6/2012	11:12:34 AM	BCl3 valve closed
12/6/2012	11:12:34 AM	PH3 valve closed
12/6/2012	11:12:34 AM	SiCl4 pre valve closed
12/6/2012	11:12:34 AM	SiCl4 post valve closed
12/6/2012	11:12:34 AM	Bypass valve closed
12/6/2012	11:12:34 AM	Bubbler valve closed
12/6/2012	11:12:34 AM	Helium valve opened
12/6/2012	11:12:34 AM	Main Vac valve opened
12/6/2012	11:12:34 AM	Helium MFC set to  20.000000
12/6/2012	11:12:34 AM	H2 MFC set to  0.000000
12/6/2012	11:12:34 AM	BCl3 MFC set to  0.000000
12/6/2012	11:12:34 AM	PH3 MFC set to  0.000000
12/6/2012	11:12:34 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:12:34 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:12:34 AM	Tube furnace set to 150
12/6/2012	11:13:04 AM	Helium valve closed
12/6/2012	11:13:04 AM	H2 valve closed
12/6/2012	11:13:04 AM	BCl3 valve closed
12/6/2012	11:13:04 AM	PH3 valve closed
12/6/2012	11:13:04 AM	SiCl4 pre valve closed
12/6/2012	11:13:04 AM	SiCl4 post valve closed
12/6/2012	11:13:04 AM	Bypass valve closed
12/6/2012	11:13:04 AM	Bubbler valve closed
12/6/2012	11:13:04 AM	Main Vac valve opened
12/6/2012	11:13:04 AM	Helium MFC set to  0.000000
12/6/2012	11:13:04 AM	H2 MFC set to  0.000000
12/6/2012	11:13:04 AM	BCl3 MFC set to  0.000000
12/6/2012	11:13:04 AM	PH3 MFC set to  0.000000
12/6/2012	11:13:04 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:13:04 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:13:04 AM	Tube furnace set to 150
12/6/2012	11:13:34 AM	H2 valve closed
12/6/2012	11:13:34 AM	BCl3 valve closed
12/6/2012	11:13:34 AM	PH3 valve closed
12/6/2012	11:13:34 AM	SiCl4 pre valve closed
12/6/2012	11:13:34 AM	SiCl4 post valve closed
12/6/2012	11:13:34 AM	Bypass valve closed
12/6/2012	11:13:34 AM	Bubbler valve closed
12/6/2012	11:13:34 AM	Helium valve opened
12/6/2012	11:13:34 AM	Main Vac valve opened
12/6/2012	11:13:34 AM	Helium MFC set to  20.000000
12/6/2012	11:13:34 AM	H2 MFC set to  0.000000
12/6/2012	11:13:34 AM	BCl3 MFC set to  0.000000
12/6/2012	11:13:34 AM	PH3 MFC set to  0.000000
12/6/2012	11:13:34 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:13:34 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:13:35 AM	Tube furnace set to 150
12/6/2012	11:14:05 AM	Helium valve closed
12/6/2012	11:14:05 AM	H2 valve closed
12/6/2012	11:14:05 AM	BCl3 valve closed
12/6/2012	11:14:05 AM	PH3 valve closed
12/6/2012	11:14:05 AM	SiCl4 pre valve closed
12/6/2012	11:14:05 AM	SiCl4 post valve closed
12/6/2012	11:14:05 AM	Bypass valve closed
12/6/2012	11:14:05 AM	Bubbler valve closed
12/6/2012	11:14:05 AM	Main Vac valve opened
12/6/2012	11:14:05 AM	Helium MFC set to  0.000000
12/6/2012	11:14:05 AM	H2 MFC set to  0.000000
12/6/2012	11:14:05 AM	BCl3 MFC set to  0.000000
12/6/2012	11:14:05 AM	PH3 MFC set to  0.000000
12/6/2012	11:14:05 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:14:05 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:14:05 AM	Tube furnace set to 150
12/6/2012	11:14:35 AM	H2 valve closed
12/6/2012	11:14:35 AM	BCl3 valve closed
12/6/2012	11:14:35 AM	PH3 valve closed
12/6/2012	11:14:35 AM	SiCl4 pre valve closed
12/6/2012	11:14:35 AM	SiCl4 post valve closed
12/6/2012	11:14:35 AM	Bypass valve closed
12/6/2012	11:14:35 AM	Bubbler valve closed
12/6/2012	11:14:35 AM	Helium valve opened
12/6/2012	11:14:35 AM	Main Vac valve opened
12/6/2012	11:14:35 AM	Helium MFC set to  20.000000
12/6/2012	11:14:35 AM	H2 MFC set to  0.000000
12/6/2012	11:14:35 AM	BCl3 MFC set to  0.000000
12/6/2012	11:14:35 AM	PH3 MFC set to  0.000000
12/6/2012	11:14:35 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:14:35 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:14:35 AM	Tube furnace set to 150
12/6/2012	11:15:05 AM	Helium valve closed
12/6/2012	11:15:05 AM	H2 valve closed
12/6/2012	11:15:05 AM	BCl3 valve closed
12/6/2012	11:15:05 AM	PH3 valve closed
12/6/2012	11:15:05 AM	SiCl4 pre valve closed
12/6/2012	11:15:05 AM	SiCl4 post valve closed
12/6/2012	11:15:05 AM	Bypass valve closed
12/6/2012	11:15:05 AM	Bubbler valve closed
12/6/2012	11:15:05 AM	Main Vac valve opened
12/6/2012	11:15:05 AM	Helium MFC set to  0.000000
12/6/2012	11:15:05 AM	H2 MFC set to  0.000000
12/6/2012	11:15:05 AM	BCl3 MFC set to  0.000000
12/6/2012	11:15:05 AM	PH3 MFC set to  0.000000
12/6/2012	11:15:05 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:15:05 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:15:05 AM	Tube furnace set to 150
12/6/2012	11:15:35 AM	H2 valve closed
12/6/2012	11:15:35 AM	BCl3 valve closed
12/6/2012	11:15:35 AM	PH3 valve closed
12/6/2012	11:15:35 AM	SiCl4 pre valve closed
12/6/2012	11:15:35 AM	SiCl4 post valve closed
12/6/2012	11:15:35 AM	Bypass valve closed
12/6/2012	11:15:35 AM	Bubbler valve closed
12/6/2012	11:15:35 AM	Helium valve opened
12/6/2012	11:15:35 AM	Main Vac valve opened
12/6/2012	11:15:35 AM	Helium MFC set to  20.000000
12/6/2012	11:15:35 AM	H2 MFC set to  0.000000
12/6/2012	11:15:35 AM	BCl3 MFC set to  0.000000
12/6/2012	11:15:35 AM	PH3 MFC set to  0.000000
12/6/2012	11:15:35 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:15:35 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:15:36 AM	Tube furnace set to 150
12/6/2012	11:16:06 AM	Helium valve closed
12/6/2012	11:16:06 AM	H2 valve closed
12/6/2012	11:16:06 AM	BCl3 valve closed
12/6/2012	11:16:06 AM	PH3 valve closed
12/6/2012	11:16:06 AM	SiCl4 pre valve closed
12/6/2012	11:16:06 AM	SiCl4 post valve closed
12/6/2012	11:16:06 AM	Bypass valve closed
12/6/2012	11:16:06 AM	Bubbler valve closed
12/6/2012	11:16:06 AM	Main Vac valve opened
12/6/2012	11:16:06 AM	Helium MFC set to  0.000000
12/6/2012	11:16:06 AM	H2 MFC set to  0.000000
12/6/2012	11:16:06 AM	BCl3 MFC set to  0.000000
12/6/2012	11:16:06 AM	PH3 MFC set to  0.000000
12/6/2012	11:16:06 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:16:06 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:16:06 AM	Tube furnace set to 150
12/6/2012	11:16:36 AM	H2 valve closed
12/6/2012	11:16:36 AM	BCl3 valve closed
12/6/2012	11:16:36 AM	PH3 valve closed
12/6/2012	11:16:36 AM	SiCl4 pre valve closed
12/6/2012	11:16:36 AM	SiCl4 post valve closed
12/6/2012	11:16:36 AM	Bypass valve closed
12/6/2012	11:16:36 AM	Bubbler valve closed
12/6/2012	11:16:36 AM	Helium valve opened
12/6/2012	11:16:36 AM	Main Vac valve opened
12/6/2012	11:16:36 AM	Helium MFC set to  20.000000
12/6/2012	11:16:36 AM	H2 MFC set to  0.000000
12/6/2012	11:16:36 AM	BCl3 MFC set to  0.000000
12/6/2012	11:16:36 AM	PH3 MFC set to  0.000000
12/6/2012	11:16:36 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:16:36 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:16:36 AM	Tube furnace set to 150
12/6/2012	11:17:06 AM	Helium valve closed
12/6/2012	11:17:06 AM	H2 valve closed
12/6/2012	11:17:06 AM	BCl3 valve closed
12/6/2012	11:17:06 AM	PH3 valve closed
12/6/2012	11:17:06 AM	SiCl4 pre valve closed
12/6/2012	11:17:06 AM	SiCl4 post valve closed
12/6/2012	11:17:06 AM	Bypass valve closed
12/6/2012	11:17:06 AM	Bubbler valve closed
12/6/2012	11:17:06 AM	Main Vac valve opened
12/6/2012	11:17:06 AM	Helium MFC set to  0.000000
12/6/2012	11:17:06 AM	H2 MFC set to  0.000000
12/6/2012	11:17:06 AM	BCl3 MFC set to  0.000000
12/6/2012	11:17:06 AM	PH3 MFC set to  0.000000
12/6/2012	11:17:06 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:17:06 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:17:06 AM	Tube furnace set to 150
12/6/2012	11:17:36 AM	H2 valve closed
12/6/2012	11:17:36 AM	BCl3 valve closed
12/6/2012	11:17:36 AM	PH3 valve closed
12/6/2012	11:17:36 AM	SiCl4 pre valve closed
12/6/2012	11:17:36 AM	SiCl4 post valve closed
12/6/2012	11:17:36 AM	Bypass valve closed
12/6/2012	11:17:36 AM	Bubbler valve closed
12/6/2012	11:17:36 AM	Helium valve opened
12/6/2012	11:17:36 AM	Main Vac valve opened
12/6/2012	11:17:36 AM	Helium MFC set to  20.000000
12/6/2012	11:17:36 AM	H2 MFC set to  0.000000
12/6/2012	11:17:36 AM	BCl3 MFC set to  0.000000
12/6/2012	11:17:36 AM	PH3 MFC set to  0.000000
12/6/2012	11:17:36 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:17:36 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:17:36 AM	Tube furnace set to 150
12/6/2012	11:18:07 AM	Helium valve closed
12/6/2012	11:18:07 AM	H2 valve closed
12/6/2012	11:18:07 AM	BCl3 valve closed
12/6/2012	11:18:07 AM	PH3 valve closed
12/6/2012	11:18:07 AM	SiCl4 pre valve closed
12/6/2012	11:18:07 AM	SiCl4 post valve closed
12/6/2012	11:18:07 AM	Bypass valve closed
12/6/2012	11:18:07 AM	Bubbler valve closed
12/6/2012	11:18:07 AM	Main Vac valve opened
12/6/2012	11:18:07 AM	Helium MFC set to  0.000000
12/6/2012	11:18:07 AM	H2 MFC set to  0.000000
12/6/2012	11:18:07 AM	BCl3 MFC set to  0.000000
12/6/2012	11:18:07 AM	PH3 MFC set to  0.000000
12/6/2012	11:18:07 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:18:07 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:18:07 AM	Tube furnace set to 150
12/6/2012	11:18:37 AM	H2 valve closed
12/6/2012	11:18:37 AM	BCl3 valve closed
12/6/2012	11:18:37 AM	PH3 valve closed
12/6/2012	11:18:37 AM	SiCl4 pre valve closed
12/6/2012	11:18:37 AM	SiCl4 post valve closed
12/6/2012	11:18:37 AM	Bypass valve closed
12/6/2012	11:18:37 AM	Bubbler valve closed
12/6/2012	11:18:37 AM	Helium valve opened
12/6/2012	11:18:37 AM	Main Vac valve opened
12/6/2012	11:18:37 AM	Helium MFC set to  20.000000
12/6/2012	11:18:37 AM	H2 MFC set to  0.000000
12/6/2012	11:18:37 AM	BCl3 MFC set to  0.000000
12/6/2012	11:18:37 AM	PH3 MFC set to  0.000000
12/6/2012	11:18:37 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:18:37 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:18:37 AM	Tube furnace set to 150
12/6/2012	11:19:07 AM	Helium valve closed
12/6/2012	11:19:07 AM	H2 valve closed
12/6/2012	11:19:07 AM	BCl3 valve closed
12/6/2012	11:19:07 AM	PH3 valve closed
12/6/2012	11:19:07 AM	SiCl4 pre valve closed
12/6/2012	11:19:07 AM	SiCl4 post valve closed
12/6/2012	11:19:07 AM	Bypass valve closed
12/6/2012	11:19:07 AM	Bubbler valve closed
12/6/2012	11:19:07 AM	Main Vac valve opened
12/6/2012	11:19:07 AM	Helium MFC set to  0.000000
12/6/2012	11:19:07 AM	H2 MFC set to  0.000000
12/6/2012	11:19:07 AM	BCl3 MFC set to  0.000000
12/6/2012	11:19:07 AM	PH3 MFC set to  0.000000
12/6/2012	11:19:07 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:19:07 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:19:07 AM	Tube furnace set to 150
12/6/2012	11:19:37 AM	H2 valve closed
12/6/2012	11:19:37 AM	BCl3 valve closed
12/6/2012	11:19:37 AM	PH3 valve closed
12/6/2012	11:19:37 AM	SiCl4 pre valve closed
12/6/2012	11:19:37 AM	SiCl4 post valve closed
12/6/2012	11:19:37 AM	Bypass valve closed
12/6/2012	11:19:37 AM	Bubbler valve closed
12/6/2012	11:19:37 AM	Helium valve opened
12/6/2012	11:19:37 AM	Main Vac valve opened
12/6/2012	11:19:37 AM	Helium MFC set to  20.000000
12/6/2012	11:19:37 AM	H2 MFC set to  0.000000
12/6/2012	11:19:37 AM	BCl3 MFC set to  0.000000
12/6/2012	11:19:37 AM	PH3 MFC set to  0.000000
12/6/2012	11:19:37 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:19:37 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:19:37 AM	Tube furnace set to 150
12/6/2012	11:20:07 AM	Helium valve closed
12/6/2012	11:20:07 AM	H2 valve closed
12/6/2012	11:20:07 AM	BCl3 valve closed
12/6/2012	11:20:07 AM	PH3 valve closed
12/6/2012	11:20:07 AM	SiCl4 pre valve closed
12/6/2012	11:20:07 AM	SiCl4 post valve closed
12/6/2012	11:20:07 AM	Bypass valve closed
12/6/2012	11:20:07 AM	Bubbler valve closed
12/6/2012	11:20:07 AM	Main Vac valve opened
12/6/2012	11:20:07 AM	Helium MFC set to  0.000000
12/6/2012	11:20:07 AM	H2 MFC set to  0.000000
12/6/2012	11:20:08 AM	BCl3 MFC set to  0.000000
12/6/2012	11:20:08 AM	PH3 MFC set to  0.000000
12/6/2012	11:20:08 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:20:08 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:20:08 AM	Tube furnace set to 150
12/6/2012	11:20:09 AM	Run finished at 11:20 AM
12/6/2012	11:23:53 AM	Recipe started at 11:23 AM
12/6/2012	11:23:53 AM	Helium valve closed
12/6/2012	11:23:53 AM	H2 valve closed
12/6/2012	11:23:53 AM	BCl3 valve closed
12/6/2012	11:23:53 AM	PH3 valve closed
12/6/2012	11:23:53 AM	SiCl4 pre valve closed
12/6/2012	11:23:53 AM	SiCl4 post valve closed
12/6/2012	11:23:53 AM	Main Vac valve closed
12/6/2012	11:23:53 AM	Bypass valve closed
12/6/2012	11:23:53 AM	Bubbler valve closed
12/6/2012	11:23:53 AM	Helium MFC set to  0.000000
12/6/2012	11:23:53 AM	H2 MFC set to  0.000000
12/6/2012	11:23:53 AM	BCl3 MFC set to  0.000000
12/6/2012	11:23:53 AM	PH3 MFC set to  0.000000
12/6/2012	11:23:53 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:23:53 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:23:53 AM	Tube furnace set to 0
12/6/2012	11:23:56 AM	Helium valve closed
12/6/2012	11:23:56 AM	BCl3 valve closed
12/6/2012	11:23:56 AM	PH3 valve closed
12/6/2012	11:23:56 AM	SiCl4 pre valve closed
12/6/2012	11:23:56 AM	SiCl4 post valve closed
12/6/2012	11:23:56 AM	Main Vac valve closed
12/6/2012	11:23:56 AM	Bypass valve closed
12/6/2012	11:23:56 AM	Bubbler valve closed
12/6/2012	11:23:56 AM	H2 valve opened
12/6/2012	11:23:56 AM	Helium MFC set to  0.000000
12/6/2012	11:23:56 AM	H2 MFC set to  500.000000
12/6/2012	11:23:56 AM	BCl3 MFC set to  0.000000
12/6/2012	11:23:56 AM	PH3 MFC set to  0.000000
12/6/2012	11:23:56 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:23:56 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:23:56 AM	Tube furnace set to 0
12/6/2012	11:24:12 AM	Run aborted at 11:24 AM
12/6/2012	11:24:12 AM	Helium valve closed
12/6/2012	11:24:12 AM	H2 valve closed
12/6/2012	11:24:12 AM	BCl3 valve closed
12/6/2012	11:24:12 AM	PH3 valve closed
12/6/2012	11:24:12 AM	SiCl4 pre valve closed
12/6/2012	11:24:12 AM	SiCl4 post valve closed
12/6/2012	11:24:12 AM	Bypass valve closed
12/6/2012	11:24:12 AM	Main Vac valve closed
12/6/2012	11:24:12 AM	Bubbler valve closed
12/6/2012	11:24:12 AM	Helium MFC set to  0.000000
12/6/2012	11:24:12 AM	H2 MFC set to  0.000000
12/6/2012	11:24:12 AM	BCl3 MFC set to  0.000000
12/6/2012	11:24:12 AM	PH3 MFC set to  0.000000
12/6/2012	11:24:12 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:24:12 AM	Tube furnace set to 0
12/6/2012	11:24:25 AM	Recipe started at 11:24 AM
12/6/2012	11:24:25 AM	Helium valve closed
12/6/2012	11:24:25 AM	H2 valve closed
12/6/2012	11:24:25 AM	BCl3 valve closed
12/6/2012	11:24:25 AM	PH3 valve closed
12/6/2012	11:24:25 AM	SiCl4 pre valve closed
12/6/2012	11:24:25 AM	SiCl4 post valve closed
12/6/2012	11:24:25 AM	Main Vac valve closed
12/6/2012	11:24:25 AM	Bypass valve closed
12/6/2012	11:24:25 AM	Bubbler valve closed
12/6/2012	11:24:25 AM	Helium MFC set to  0.000000
12/6/2012	11:24:25 AM	H2 MFC set to  0.000000
12/6/2012	11:24:25 AM	BCl3 MFC set to  0.000000
12/6/2012	11:24:25 AM	PH3 MFC set to  0.000000
12/6/2012	11:24:25 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:24:25 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:24:25 AM	Tube furnace set to 0
12/6/2012	11:24:28 AM	Helium valve closed
12/6/2012	11:24:28 AM	BCl3 valve closed
12/6/2012	11:24:28 AM	PH3 valve closed
12/6/2012	11:24:28 AM	SiCl4 pre valve closed
12/6/2012	11:24:28 AM	SiCl4 post valve closed
12/6/2012	11:24:28 AM	Main Vac valve closed
12/6/2012	11:24:28 AM	Bypass valve closed
12/6/2012	11:24:28 AM	Bubbler valve closed
12/6/2012	11:24:28 AM	H2 valve opened
12/6/2012	11:24:28 AM	Helium MFC set to  0.000000
12/6/2012	11:24:28 AM	H2 MFC set to  500.000000
12/6/2012	11:24:28 AM	BCl3 MFC set to  0.000000
12/6/2012	11:24:28 AM	PH3 MFC set to  0.000000
12/6/2012	11:24:28 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:24:28 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:24:28 AM	Tube furnace set to 0
12/6/2012	11:25:25 AM	Helium valve closed
12/6/2012	11:25:25 AM	BCl3 valve closed
12/6/2012	11:25:25 AM	PH3 valve closed
12/6/2012	11:25:25 AM	SiCl4 pre valve closed
12/6/2012	11:25:25 AM	SiCl4 post valve closed
12/6/2012	11:25:25 AM	Main Vac valve closed
12/6/2012	11:25:25 AM	Bypass valve closed
12/6/2012	11:25:25 AM	H2 valve opened
12/6/2012	11:25:25 AM	Bubbler valve opened
12/6/2012	11:25:25 AM	Helium MFC set to  0.000000
12/6/2012	11:25:25 AM	H2 MFC set to  500.000000
12/6/2012	11:25:25 AM	BCl3 MFC set to  0.000000
12/6/2012	11:25:25 AM	PH3 MFC set to  0.000000
12/6/2012	11:25:25 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:25:25 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:25:25 AM	Tube furnace set to 0
12/6/2012	11:25:26 AM	Helium valve closed
12/6/2012	11:25:26 AM	BCl3 valve closed
12/6/2012	11:25:26 AM	PH3 valve closed
12/6/2012	11:25:26 AM	SiCl4 pre valve closed
12/6/2012	11:25:26 AM	SiCl4 post valve closed
12/6/2012	11:25:26 AM	Main Vac valve closed
12/6/2012	11:25:26 AM	Bypass valve closed
12/6/2012	11:25:26 AM	H2 valve opened
12/6/2012	11:25:26 AM	Bubbler valve opened
12/6/2012	11:25:26 AM	Helium MFC set to  0.000000
12/6/2012	11:25:26 AM	H2 MFC set to  500.000000
12/6/2012	11:25:26 AM	BCl3 MFC set to  0.000000
12/6/2012	11:25:26 AM	PH3 MFC set to  0.000000
12/6/2012	11:25:26 AM	SiCl4 MFC set to  0.000000
12/6/2012	11:25:26 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:25:26 AM	Tube furnace set to 1000
12/6/2012	11:45:26 AM	Helium valve closed
12/6/2012	11:45:26 AM	PH3 valve closed
12/6/2012	11:45:26 AM	Main Vac valve closed
12/6/2012	11:45:26 AM	Bypass valve closed
12/6/2012	11:45:26 AM	H2 valve opened
12/6/2012	11:45:26 AM	BCl3 valve opened
12/6/2012	11:45:26 AM	SiCl4 pre valve opened
12/6/2012	11:45:26 AM	SiCl4 post valve opened
12/6/2012	11:45:26 AM	Bubbler valve opened
12/6/2012	11:45:26 AM	Helium MFC set to  0.000000
12/6/2012	11:45:26 AM	H2 MFC set to  450.000000
12/6/2012	11:45:26 AM	BCl3 MFC set to  1.300000
12/6/2012	11:45:26 AM	PH3 MFC set to  0.000000
12/6/2012	11:45:26 AM	SiCl4 MFC set to  50.000000
12/6/2012	11:45:26 AM	Bypass solenoid MFC set to  0.000000
12/6/2012	11:45:26 AM	Tube furnace set to 1000
12/6/2012	12:03:26 PM	Helium valve closed
12/6/2012	12:03:26 PM	BCl3 valve closed
12/6/2012	12:03:26 PM	Main Vac valve closed
12/6/2012	12:03:26 PM	Bypass valve closed
12/6/2012	12:03:26 PM	H2 valve opened
12/6/2012	12:03:26 PM	PH3 valve opened
12/6/2012	12:03:26 PM	SiCl4 pre valve opened
12/6/2012	12:03:26 PM	SiCl4 post valve opened
12/6/2012	12:03:26 PM	Bubbler valve opened
12/6/2012	12:03:26 PM	Helium MFC set to  0.000000
12/6/2012	12:03:26 PM	H2 MFC set to  450.000000
12/6/2012	12:03:26 PM	BCl3 MFC set to  0.000000
12/6/2012	12:03:26 PM	PH3 MFC set to  20.000000
12/6/2012	12:03:26 PM	SiCl4 MFC set to  50.000000
12/6/2012	12:03:26 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	12:03:27 PM	Tube furnace set to 1000
12/6/2012	12:09:27 PM	Helium valve closed
12/6/2012	12:09:27 PM	BCl3 valve closed
12/6/2012	12:09:27 PM	PH3 valve closed
12/6/2012	12:09:27 PM	SiCl4 pre valve closed
12/6/2012	12:09:27 PM	SiCl4 post valve closed
12/6/2012	12:09:27 PM	Main Vac valve closed
12/6/2012	12:09:27 PM	Bypass valve closed
12/6/2012	12:09:27 PM	H2 valve opened
12/6/2012	12:09:27 PM	Bubbler valve opened
12/6/2012	12:09:27 PM	Helium MFC set to  0.000000
12/6/2012	12:09:27 PM	H2 MFC set to  500.000000
12/6/2012	12:09:27 PM	BCl3 MFC set to  0.000000
12/6/2012	12:09:27 PM	PH3 MFC set to  0.000000
12/6/2012	12:09:27 PM	SiCl4 MFC set to  0.000000
12/6/2012	12:09:27 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	12:09:27 PM	Tube furnace set to 950
12/6/2012	12:12:27 PM	Helium valve closed
12/6/2012	12:12:27 PM	BCl3 valve closed
12/6/2012	12:12:27 PM	PH3 valve closed
12/6/2012	12:12:27 PM	SiCl4 pre valve closed
12/6/2012	12:12:27 PM	SiCl4 post valve closed
12/6/2012	12:12:27 PM	Main Vac valve closed
12/6/2012	12:12:27 PM	Bypass valve closed
12/6/2012	12:12:27 PM	H2 valve opened
12/6/2012	12:12:27 PM	Bubbler valve opened
12/6/2012	12:12:27 PM	Helium MFC set to  0.000000
12/6/2012	12:12:27 PM	H2 MFC set to  500.000000
12/6/2012	12:12:27 PM	BCl3 MFC set to  0.000000
12/6/2012	12:12:27 PM	PH3 MFC set to  0.000000
12/6/2012	12:12:27 PM	SiCl4 MFC set to  0.000000
12/6/2012	12:12:27 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	12:12:27 PM	Tube furnace set to 900
12/6/2012	12:15:27 PM	Helium valve closed
12/6/2012	12:15:27 PM	BCl3 valve closed
12/6/2012	12:15:27 PM	PH3 valve closed
12/6/2012	12:15:27 PM	SiCl4 pre valve closed
12/6/2012	12:15:27 PM	SiCl4 post valve closed
12/6/2012	12:15:27 PM	Main Vac valve closed
12/6/2012	12:15:27 PM	Bypass valve closed
12/6/2012	12:15:27 PM	H2 valve opened
12/6/2012	12:15:27 PM	Bubbler valve opened
12/6/2012	12:15:27 PM	Helium MFC set to  0.000000
12/6/2012	12:15:27 PM	H2 MFC set to  500.000000
12/6/2012	12:15:27 PM	BCl3 MFC set to  0.000000
12/6/2012	12:15:27 PM	PH3 MFC set to  0.000000
12/6/2012	12:15:27 PM	SiCl4 MFC set to  0.000000
12/6/2012	12:15:27 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	12:15:27 PM	Tube furnace set to 850
12/6/2012	12:18:27 PM	Helium valve closed
12/6/2012	12:18:27 PM	BCl3 valve closed
12/6/2012	12:18:27 PM	PH3 valve closed
12/6/2012	12:18:27 PM	SiCl4 pre valve closed
12/6/2012	12:18:27 PM	SiCl4 post valve closed
12/6/2012	12:18:27 PM	Main Vac valve closed
12/6/2012	12:18:27 PM	Bypass valve closed
12/6/2012	12:18:27 PM	H2 valve opened
12/6/2012	12:18:27 PM	Bubbler valve opened
12/6/2012	12:18:27 PM	Helium MFC set to  0.000000
12/6/2012	12:18:27 PM	H2 MFC set to  500.000000
12/6/2012	12:18:27 PM	BCl3 MFC set to  0.000000
12/6/2012	12:18:27 PM	PH3 MFC set to  0.000000
12/6/2012	12:18:27 PM	SiCl4 MFC set to  0.000000
12/6/2012	12:18:27 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	12:18:27 PM	Tube furnace set to 800
12/6/2012	12:21:27 PM	Helium valve closed
12/6/2012	12:21:27 PM	BCl3 valve closed
12/6/2012	12:21:27 PM	PH3 valve closed
12/6/2012	12:21:27 PM	SiCl4 pre valve closed
12/6/2012	12:21:27 PM	SiCl4 post valve closed
12/6/2012	12:21:27 PM	Main Vac valve closed
12/6/2012	12:21:27 PM	Bypass valve closed
12/6/2012	12:21:28 PM	H2 valve opened
12/6/2012	12:21:28 PM	Bubbler valve opened
12/6/2012	12:21:28 PM	Helium MFC set to  0.000000
12/6/2012	12:21:28 PM	H2 MFC set to  500.000000
12/6/2012	12:21:28 PM	BCl3 MFC set to  0.000000
12/6/2012	12:21:28 PM	PH3 MFC set to  0.000000
12/6/2012	12:21:28 PM	SiCl4 MFC set to  0.000000
12/6/2012	12:21:28 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	12:21:28 PM	Tube furnace set to 750
12/6/2012	12:24:28 PM	H2 valve closed
12/6/2012	12:24:28 PM	BCl3 valve closed
12/6/2012	12:24:28 PM	PH3 valve closed
12/6/2012	12:24:28 PM	SiCl4 pre valve closed
12/6/2012	12:24:28 PM	SiCl4 post valve closed
12/6/2012	12:24:28 PM	Main Vac valve closed
12/6/2012	12:24:28 PM	Bypass valve closed
12/6/2012	12:24:28 PM	Helium valve opened
12/6/2012	12:24:28 PM	Bubbler valve opened
12/6/2012	12:24:28 PM	Helium MFC set to  500.000000
12/6/2012	12:24:28 PM	H2 MFC set to  0.000000
12/6/2012	12:24:28 PM	BCl3 MFC set to  0.000000
12/6/2012	12:24:28 PM	PH3 MFC set to  0.000000
12/6/2012	12:24:28 PM	SiCl4 MFC set to  0.000000
12/6/2012	12:24:28 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	12:24:28 PM	Tube furnace set to 0
12/6/2012	12:44:28 PM	Helium valve closed
12/6/2012	12:44:28 PM	H2 valve closed
12/6/2012	12:44:28 PM	BCl3 valve closed
12/6/2012	12:44:28 PM	PH3 valve closed
12/6/2012	12:44:28 PM	SiCl4 pre valve closed
12/6/2012	12:44:28 PM	SiCl4 post valve closed
12/6/2012	12:44:28 PM	Main Vac valve closed
12/6/2012	12:44:28 PM	Bypass valve closed
12/6/2012	12:44:28 PM	Bubbler valve closed
12/6/2012	12:44:28 PM	Helium MFC set to  0.000000
12/6/2012	12:44:28 PM	H2 MFC set to  0.000000
12/6/2012	12:44:28 PM	BCl3 MFC set to  0.000000
12/6/2012	12:44:28 PM	PH3 MFC set to  0.000000
12/6/2012	12:44:28 PM	SiCl4 MFC set to  0.000000
12/6/2012	12:44:28 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	12:44:28 PM	Tube furnace set to 0
12/6/2012	1:14:28 PM	Helium valve closed
12/6/2012	1:14:28 PM	H2 valve closed
12/6/2012	1:14:28 PM	BCl3 valve closed
12/6/2012	1:14:28 PM	PH3 valve closed
12/6/2012	1:14:28 PM	SiCl4 pre valve closed
12/6/2012	1:14:28 PM	SiCl4 post valve closed
12/6/2012	1:14:28 PM	Main Vac valve closed
12/6/2012	1:14:28 PM	Bubbler valve closed
12/6/2012	1:14:28 PM	Bypass valve opened
12/6/2012	1:14:28 PM	Helium MFC set to  0.000000
12/6/2012	1:14:28 PM	H2 MFC set to  0.000000
12/6/2012	1:14:28 PM	BCl3 MFC set to  0.000000
12/6/2012	1:14:28 PM	PH3 MFC set to  0.000000
12/6/2012	1:14:28 PM	SiCl4 MFC set to  0.000000
12/6/2012	1:14:28 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	1:14:28 PM	Tube furnace set to 0
12/6/2012	1:15:29 PM	Helium valve closed
12/6/2012	1:15:29 PM	H2 valve closed
12/6/2012	1:15:29 PM	BCl3 valve closed
12/6/2012	1:15:29 PM	PH3 valve closed
12/6/2012	1:15:29 PM	SiCl4 pre valve closed
12/6/2012	1:15:29 PM	SiCl4 post valve closed
12/6/2012	1:15:29 PM	Main Vac valve closed
12/6/2012	1:15:29 PM	Bubbler valve closed
12/6/2012	1:15:29 PM	Bypass valve opened
12/6/2012	1:15:29 PM	Helium MFC set to  0.000000
12/6/2012	1:15:29 PM	H2 MFC set to  0.000000
12/6/2012	1:15:29 PM	BCl3 MFC set to  0.000000
12/6/2012	1:15:29 PM	PH3 MFC set to  0.000000
12/6/2012	1:15:29 PM	SiCl4 MFC set to  0.000000
12/6/2012	1:15:29 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	1:15:29 PM	Tube furnace set to 0
12/6/2012	1:15:45 PM	Run aborted at 1:15 PM
12/6/2012	1:15:45 PM	Helium valve closed
12/6/2012	1:15:45 PM	H2 valve closed
12/6/2012	1:15:45 PM	BCl3 valve closed
12/6/2012	1:15:45 PM	PH3 valve closed
12/6/2012	1:15:45 PM	SiCl4 pre valve closed
12/6/2012	1:15:45 PM	SiCl4 post valve closed
12/6/2012	1:15:45 PM	Bypass valve closed
12/6/2012	1:15:45 PM	Main Vac valve closed
12/6/2012	1:15:45 PM	Bubbler valve closed
12/6/2012	1:15:45 PM	Helium MFC set to  0.000000
12/6/2012	1:15:45 PM	H2 MFC set to  0.000000
12/6/2012	1:15:45 PM	BCl3 MFC set to  0.000000
12/6/2012	1:15:45 PM	PH3 MFC set to  0.000000
12/6/2012	1:15:45 PM	SiCl4 MFC set to  0.000000
12/6/2012	1:15:45 PM	Tube furnace set to 0
12/6/2012	1:15:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2012	1:15:47 PM	Recipe started at 1:15 PM
12/6/2012	1:15:47 PM	Helium valve closed
12/6/2012	1:15:47 PM	H2 valve closed
12/6/2012	1:15:47 PM	BCl3 valve closed
12/6/2012	1:15:47 PM	PH3 valve closed
12/6/2012	1:15:47 PM	SiCl4 pre valve closed
12/6/2012	1:15:47 PM	SiCl4 post valve closed
12/6/2012	1:15:47 PM	Main Vac valve closed
12/6/2012	1:15:47 PM	Bypass valve closed
12/6/2012	1:15:47 PM	Bubbler valve closed
12/6/2012	1:15:47 PM	Helium MFC set to  0.000000
12/6/2012	1:15:47 PM	H2 MFC set to  0.000000
12/6/2012	1:15:47 PM	BCl3 MFC set to  0.000000
12/6/2012	1:15:47 PM	PH3 MFC set to  0.000000
12/6/2012	1:15:47 PM	SiCl4 MFC set to  0.000000
12/6/2012	1:15:47 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	1:15:48 PM	Tube furnace set to 0
12/6/2012	1:15:51 PM	H2 valve closed
12/6/2012	1:15:51 PM	BCl3 valve closed
12/6/2012	1:15:51 PM	PH3 valve closed
12/6/2012	1:15:51 PM	SiCl4 pre valve closed
12/6/2012	1:15:51 PM	SiCl4 post valve closed
12/6/2012	1:15:51 PM	Main Vac valve closed
12/6/2012	1:15:51 PM	Bypass valve closed
12/6/2012	1:15:51 PM	Bubbler valve closed
12/6/2012	1:15:51 PM	Helium valve opened
12/6/2012	1:15:51 PM	Helium MFC set to  500.000000
12/6/2012	1:15:51 PM	H2 MFC set to  0.000000
12/6/2012	1:15:51 PM	BCl3 MFC set to  0.000000
12/6/2012	1:15:51 PM	PH3 MFC set to  0.000000
12/6/2012	1:15:51 PM	SiCl4 MFC set to  0.000000
12/6/2012	1:15:51 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	1:15:51 PM	Tube furnace set to 0
12/6/2012	1:16:56 PM	Helium valve closed
12/6/2012	1:16:56 PM	H2 valve closed
12/6/2012	1:16:56 PM	BCl3 valve closed
12/6/2012	1:16:56 PM	PH3 valve closed
12/6/2012	1:16:56 PM	SiCl4 pre valve closed
12/6/2012	1:16:56 PM	SiCl4 post valve closed
12/6/2012	1:16:56 PM	Main Vac valve closed
12/6/2012	1:16:56 PM	Bypass valve closed
12/6/2012	1:16:56 PM	Bubbler valve closed
12/6/2012	1:16:56 PM	Helium MFC set to  0.000000
12/6/2012	1:16:56 PM	H2 MFC set to  0.000000
12/6/2012	1:16:56 PM	BCl3 MFC set to  0.000000
12/6/2012	1:16:56 PM	PH3 MFC set to  0.000000
12/6/2012	1:16:56 PM	SiCl4 MFC set to  0.000000
12/6/2012	1:16:56 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	1:16:56 PM	Tube furnace set to 0
12/6/2012	1:16:57 PM	Run finished at 1:16 PM
12/6/2012	1:16:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2012	1:24:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/6/2012	1:24:19 PM	Recipe started at 1:24 PM
12/6/2012	1:24:19 PM	Helium valve closed
12/6/2012	1:24:19 PM	H2 valve closed
12/6/2012	1:24:19 PM	BCl3 valve closed
12/6/2012	1:24:19 PM	PH3 valve closed
12/6/2012	1:24:19 PM	SiCl4 pre valve closed
12/6/2012	1:24:19 PM	SiCl4 post valve closed
12/6/2012	1:24:19 PM	Main Vac valve closed
12/6/2012	1:24:19 PM	Bubbler valve closed
12/6/2012	1:24:19 PM	Bypass valve opened
12/6/2012	1:24:19 PM	Helium MFC set to  0.000000
12/6/2012	1:24:19 PM	H2 MFC set to  0.000000
12/6/2012	1:24:19 PM	BCl3 MFC set to  0.000000
12/6/2012	1:24:19 PM	PH3 MFC set to  0.000000
12/6/2012	1:24:19 PM	SiCl4 MFC set to  0.000000
12/6/2012	1:24:19 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	1:24:20 PM	Tube furnace set to 0
12/6/2012	1:25:44 PM	Helium valve closed
12/6/2012	1:25:44 PM	H2 valve closed
12/6/2012	1:25:44 PM	BCl3 valve closed
12/6/2012	1:25:44 PM	PH3 valve closed
12/6/2012	1:25:44 PM	SiCl4 pre valve closed
12/6/2012	1:25:44 PM	SiCl4 post valve closed
12/6/2012	1:25:44 PM	Main Vac valve closed
12/6/2012	1:25:44 PM	Bubbler valve closed
12/6/2012	1:25:44 PM	Bypass valve opened
12/6/2012	1:25:44 PM	Helium MFC set to  0.000000
12/6/2012	1:25:44 PM	H2 MFC set to  0.000000
12/6/2012	1:25:44 PM	BCl3 MFC set to  0.000000
12/6/2012	1:25:44 PM	PH3 MFC set to  0.000000
12/6/2012	1:25:44 PM	SiCl4 MFC set to  0.000000
12/6/2012	1:25:44 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	1:25:45 PM	Tube furnace set to 0
12/6/2012	1:26:45 PM	Helium valve closed
12/6/2012	1:26:45 PM	H2 valve closed
12/6/2012	1:26:45 PM	BCl3 valve closed
12/6/2012	1:26:45 PM	PH3 valve closed
12/6/2012	1:26:45 PM	SiCl4 pre valve closed
12/6/2012	1:26:45 PM	SiCl4 post valve closed
12/6/2012	1:26:45 PM	Bypass valve closed
12/6/2012	1:26:45 PM	Bubbler valve closed
12/6/2012	1:26:45 PM	Main Vac valve opened
12/6/2012	1:26:45 PM	Helium MFC set to  0.000000
12/6/2012	1:26:45 PM	H2 MFC set to  0.000000
12/6/2012	1:26:45 PM	BCl3 MFC set to  0.000000
12/6/2012	1:26:45 PM	PH3 MFC set to  0.000000
12/6/2012	1:26:45 PM	SiCl4 MFC set to  0.000000
12/6/2012	1:26:45 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	1:26:45 PM	Tube furnace set to 0
12/6/2012	1:26:46 PM	Run finished at 1:26 PM
12/6/2012	1:26:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/6/2012	2:33:27 PM	Recipe started at 2:33 PM
12/6/2012	2:33:27 PM	Helium valve closed
12/6/2012	2:33:27 PM	H2 valve closed
12/6/2012	2:33:27 PM	BCl3 valve closed
12/6/2012	2:33:27 PM	PH3 valve closed
12/6/2012	2:33:27 PM	SiCl4 pre valve closed
12/6/2012	2:33:27 PM	SiCl4 post valve closed
12/6/2012	2:33:27 PM	Bypass valve closed
12/6/2012	2:33:27 PM	Bubbler valve closed
12/6/2012	2:33:27 PM	Main Vac valve opened
12/6/2012	2:33:27 PM	Helium MFC set to  0.000000
12/6/2012	2:33:27 PM	H2 MFC set to  0.000000
12/6/2012	2:33:27 PM	BCl3 MFC set to  0.000000
12/6/2012	2:33:27 PM	PH3 MFC set to  0.000000
12/6/2012	2:33:27 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:33:27 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:33:27 PM	Tube furnace set to 150
12/6/2012	2:33:28 PM	H2 valve closed
12/6/2012	2:33:28 PM	BCl3 valve closed
12/6/2012	2:33:28 PM	PH3 valve closed
12/6/2012	2:33:28 PM	SiCl4 pre valve closed
12/6/2012	2:33:28 PM	SiCl4 post valve closed
12/6/2012	2:33:28 PM	Bypass valve closed
12/6/2012	2:33:28 PM	Bubbler valve closed
12/6/2012	2:33:28 PM	Helium valve opened
12/6/2012	2:33:28 PM	Main Vac valve opened
12/6/2012	2:33:28 PM	Helium MFC set to  20.000000
12/6/2012	2:33:28 PM	H2 MFC set to  0.000000
12/6/2012	2:33:28 PM	BCl3 MFC set to  0.000000
12/6/2012	2:33:28 PM	PH3 MFC set to  0.000000
12/6/2012	2:33:28 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:33:28 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:33:28 PM	Tube furnace set to 150
12/6/2012	2:33:58 PM	Helium valve closed
12/6/2012	2:33:58 PM	H2 valve closed
12/6/2012	2:33:58 PM	BCl3 valve closed
12/6/2012	2:33:58 PM	PH3 valve closed
12/6/2012	2:33:58 PM	SiCl4 pre valve closed
12/6/2012	2:33:58 PM	SiCl4 post valve closed
12/6/2012	2:33:58 PM	Bypass valve closed
12/6/2012	2:33:58 PM	Bubbler valve closed
12/6/2012	2:33:58 PM	Main Vac valve opened
12/6/2012	2:33:58 PM	Helium MFC set to  0.000000
12/6/2012	2:33:58 PM	H2 MFC set to  0.000000
12/6/2012	2:33:58 PM	BCl3 MFC set to  0.000000
12/6/2012	2:33:58 PM	PH3 MFC set to  0.000000
12/6/2012	2:33:58 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:33:58 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:33:59 PM	Tube furnace set to 150
12/6/2012	2:34:29 PM	H2 valve closed
12/6/2012	2:34:29 PM	BCl3 valve closed
12/6/2012	2:34:29 PM	PH3 valve closed
12/6/2012	2:34:29 PM	SiCl4 pre valve closed
12/6/2012	2:34:29 PM	SiCl4 post valve closed
12/6/2012	2:34:29 PM	Bypass valve closed
12/6/2012	2:34:29 PM	Bubbler valve closed
12/6/2012	2:34:29 PM	Helium valve opened
12/6/2012	2:34:29 PM	Main Vac valve opened
12/6/2012	2:34:29 PM	Helium MFC set to  20.000000
12/6/2012	2:34:29 PM	H2 MFC set to  0.000000
12/6/2012	2:34:29 PM	BCl3 MFC set to  0.000000
12/6/2012	2:34:29 PM	PH3 MFC set to  0.000000
12/6/2012	2:34:29 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:34:29 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:34:29 PM	Tube furnace set to 150
12/6/2012	2:34:59 PM	Helium valve closed
12/6/2012	2:34:59 PM	H2 valve closed
12/6/2012	2:34:59 PM	BCl3 valve closed
12/6/2012	2:34:59 PM	PH3 valve closed
12/6/2012	2:34:59 PM	SiCl4 pre valve closed
12/6/2012	2:34:59 PM	SiCl4 post valve closed
12/6/2012	2:34:59 PM	Bypass valve closed
12/6/2012	2:34:59 PM	Bubbler valve closed
12/6/2012	2:34:59 PM	Main Vac valve opened
12/6/2012	2:34:59 PM	Helium MFC set to  0.000000
12/6/2012	2:34:59 PM	H2 MFC set to  0.000000
12/6/2012	2:34:59 PM	BCl3 MFC set to  0.000000
12/6/2012	2:34:59 PM	PH3 MFC set to  0.000000
12/6/2012	2:34:59 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:34:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:34:59 PM	Tube furnace set to 150
12/6/2012	2:35:29 PM	H2 valve closed
12/6/2012	2:35:29 PM	BCl3 valve closed
12/6/2012	2:35:29 PM	PH3 valve closed
12/6/2012	2:35:29 PM	SiCl4 pre valve closed
12/6/2012	2:35:29 PM	SiCl4 post valve closed
12/6/2012	2:35:29 PM	Bypass valve closed
12/6/2012	2:35:29 PM	Bubbler valve closed
12/6/2012	2:35:29 PM	Helium valve opened
12/6/2012	2:35:29 PM	Main Vac valve opened
12/6/2012	2:35:29 PM	Helium MFC set to  20.000000
12/6/2012	2:35:29 PM	H2 MFC set to  0.000000
12/6/2012	2:35:29 PM	BCl3 MFC set to  0.000000
12/6/2012	2:35:29 PM	PH3 MFC set to  0.000000
12/6/2012	2:35:29 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:35:29 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:35:29 PM	Tube furnace set to 150
12/6/2012	2:35:59 PM	Helium valve closed
12/6/2012	2:35:59 PM	H2 valve closed
12/6/2012	2:35:59 PM	BCl3 valve closed
12/6/2012	2:35:59 PM	PH3 valve closed
12/6/2012	2:35:59 PM	SiCl4 pre valve closed
12/6/2012	2:35:59 PM	SiCl4 post valve closed
12/6/2012	2:35:59 PM	Bypass valve closed
12/6/2012	2:35:59 PM	Bubbler valve closed
12/6/2012	2:35:59 PM	Main Vac valve opened
12/6/2012	2:35:59 PM	Helium MFC set to  0.000000
12/6/2012	2:35:59 PM	H2 MFC set to  0.000000
12/6/2012	2:35:59 PM	BCl3 MFC set to  0.000000
12/6/2012	2:35:59 PM	PH3 MFC set to  0.000000
12/6/2012	2:35:59 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:35:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:36:00 PM	Tube furnace set to 150
12/6/2012	2:36:30 PM	H2 valve closed
12/6/2012	2:36:30 PM	BCl3 valve closed
12/6/2012	2:36:30 PM	PH3 valve closed
12/6/2012	2:36:30 PM	SiCl4 pre valve closed
12/6/2012	2:36:30 PM	SiCl4 post valve closed
12/6/2012	2:36:30 PM	Bypass valve closed
12/6/2012	2:36:30 PM	Bubbler valve closed
12/6/2012	2:36:30 PM	Helium valve opened
12/6/2012	2:36:30 PM	Main Vac valve opened
12/6/2012	2:36:30 PM	Helium MFC set to  20.000000
12/6/2012	2:36:30 PM	H2 MFC set to  0.000000
12/6/2012	2:36:30 PM	BCl3 MFC set to  0.000000
12/6/2012	2:36:30 PM	PH3 MFC set to  0.000000
12/6/2012	2:36:30 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:36:30 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:36:30 PM	Tube furnace set to 150
12/6/2012	2:37:00 PM	Helium valve closed
12/6/2012	2:37:00 PM	H2 valve closed
12/6/2012	2:37:00 PM	BCl3 valve closed
12/6/2012	2:37:00 PM	PH3 valve closed
12/6/2012	2:37:00 PM	SiCl4 pre valve closed
12/6/2012	2:37:00 PM	SiCl4 post valve closed
12/6/2012	2:37:00 PM	Bypass valve closed
12/6/2012	2:37:00 PM	Bubbler valve closed
12/6/2012	2:37:00 PM	Main Vac valve opened
12/6/2012	2:37:00 PM	Helium MFC set to  0.000000
12/6/2012	2:37:00 PM	H2 MFC set to  0.000000
12/6/2012	2:37:00 PM	BCl3 MFC set to  0.000000
12/6/2012	2:37:00 PM	PH3 MFC set to  0.000000
12/6/2012	2:37:00 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:37:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:37:00 PM	Tube furnace set to 150
12/6/2012	2:37:30 PM	H2 valve closed
12/6/2012	2:37:30 PM	BCl3 valve closed
12/6/2012	2:37:30 PM	PH3 valve closed
12/6/2012	2:37:30 PM	SiCl4 pre valve closed
12/6/2012	2:37:30 PM	SiCl4 post valve closed
12/6/2012	2:37:30 PM	Bypass valve closed
12/6/2012	2:37:30 PM	Bubbler valve closed
12/6/2012	2:37:30 PM	Helium valve opened
12/6/2012	2:37:30 PM	Main Vac valve opened
12/6/2012	2:37:30 PM	Helium MFC set to  20.000000
12/6/2012	2:37:30 PM	H2 MFC set to  0.000000
12/6/2012	2:37:30 PM	BCl3 MFC set to  0.000000
12/6/2012	2:37:30 PM	PH3 MFC set to  0.000000
12/6/2012	2:37:30 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:37:30 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:37:30 PM	Tube furnace set to 150
12/6/2012	2:38:00 PM	Helium valve closed
12/6/2012	2:38:00 PM	H2 valve closed
12/6/2012	2:38:00 PM	BCl3 valve closed
12/6/2012	2:38:00 PM	PH3 valve closed
12/6/2012	2:38:00 PM	SiCl4 pre valve closed
12/6/2012	2:38:00 PM	SiCl4 post valve closed
12/6/2012	2:38:00 PM	Bypass valve closed
12/6/2012	2:38:00 PM	Bubbler valve closed
12/6/2012	2:38:00 PM	Main Vac valve opened
12/6/2012	2:38:00 PM	Helium MFC set to  0.000000
12/6/2012	2:38:00 PM	H2 MFC set to  0.000000
12/6/2012	2:38:00 PM	BCl3 MFC set to  0.000000
12/6/2012	2:38:00 PM	PH3 MFC set to  0.000000
12/6/2012	2:38:00 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:38:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:38:01 PM	Tube furnace set to 150
12/6/2012	2:38:31 PM	H2 valve closed
12/6/2012	2:38:31 PM	BCl3 valve closed
12/6/2012	2:38:31 PM	PH3 valve closed
12/6/2012	2:38:31 PM	SiCl4 pre valve closed
12/6/2012	2:38:31 PM	SiCl4 post valve closed
12/6/2012	2:38:31 PM	Bypass valve closed
12/6/2012	2:38:31 PM	Bubbler valve closed
12/6/2012	2:38:31 PM	Helium valve opened
12/6/2012	2:38:31 PM	Main Vac valve opened
12/6/2012	2:38:31 PM	Helium MFC set to  20.000000
12/6/2012	2:38:31 PM	H2 MFC set to  0.000000
12/6/2012	2:38:31 PM	BCl3 MFC set to  0.000000
12/6/2012	2:38:31 PM	PH3 MFC set to  0.000000
12/6/2012	2:38:31 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:38:31 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:38:31 PM	Tube furnace set to 150
12/6/2012	2:39:01 PM	Helium valve closed
12/6/2012	2:39:01 PM	H2 valve closed
12/6/2012	2:39:01 PM	BCl3 valve closed
12/6/2012	2:39:01 PM	PH3 valve closed
12/6/2012	2:39:01 PM	SiCl4 pre valve closed
12/6/2012	2:39:01 PM	SiCl4 post valve closed
12/6/2012	2:39:01 PM	Bypass valve closed
12/6/2012	2:39:01 PM	Bubbler valve closed
12/6/2012	2:39:01 PM	Main Vac valve opened
12/6/2012	2:39:01 PM	Helium MFC set to  0.000000
12/6/2012	2:39:01 PM	H2 MFC set to  0.000000
12/6/2012	2:39:01 PM	BCl3 MFC set to  0.000000
12/6/2012	2:39:01 PM	PH3 MFC set to  0.000000
12/6/2012	2:39:01 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:39:01 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:39:01 PM	Tube furnace set to 150
12/6/2012	2:39:31 PM	H2 valve closed
12/6/2012	2:39:31 PM	BCl3 valve closed
12/6/2012	2:39:31 PM	PH3 valve closed
12/6/2012	2:39:31 PM	SiCl4 pre valve closed
12/6/2012	2:39:31 PM	SiCl4 post valve closed
12/6/2012	2:39:31 PM	Bypass valve closed
12/6/2012	2:39:31 PM	Bubbler valve closed
12/6/2012	2:39:31 PM	Helium valve opened
12/6/2012	2:39:31 PM	Main Vac valve opened
12/6/2012	2:39:31 PM	Helium MFC set to  20.000000
12/6/2012	2:39:31 PM	H2 MFC set to  0.000000
12/6/2012	2:39:31 PM	BCl3 MFC set to  0.000000
12/6/2012	2:39:31 PM	PH3 MFC set to  0.000000
12/6/2012	2:39:31 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:39:31 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:39:31 PM	Tube furnace set to 150
12/6/2012	2:40:01 PM	Helium valve closed
12/6/2012	2:40:01 PM	H2 valve closed
12/6/2012	2:40:01 PM	BCl3 valve closed
12/6/2012	2:40:01 PM	PH3 valve closed
12/6/2012	2:40:01 PM	SiCl4 pre valve closed
12/6/2012	2:40:01 PM	SiCl4 post valve closed
12/6/2012	2:40:01 PM	Bypass valve closed
12/6/2012	2:40:01 PM	Bubbler valve closed
12/6/2012	2:40:01 PM	Main Vac valve opened
12/6/2012	2:40:01 PM	Helium MFC set to  0.000000
12/6/2012	2:40:01 PM	H2 MFC set to  0.000000
12/6/2012	2:40:01 PM	BCl3 MFC set to  0.000000
12/6/2012	2:40:01 PM	PH3 MFC set to  0.000000
12/6/2012	2:40:01 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:40:02 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:40:02 PM	Tube furnace set to 150
12/6/2012	2:40:32 PM	H2 valve closed
12/6/2012	2:40:32 PM	BCl3 valve closed
12/6/2012	2:40:32 PM	PH3 valve closed
12/6/2012	2:40:32 PM	SiCl4 pre valve closed
12/6/2012	2:40:32 PM	SiCl4 post valve closed
12/6/2012	2:40:32 PM	Bypass valve closed
12/6/2012	2:40:32 PM	Bubbler valve closed
12/6/2012	2:40:32 PM	Helium valve opened
12/6/2012	2:40:32 PM	Main Vac valve opened
12/6/2012	2:40:32 PM	Helium MFC set to  20.000000
12/6/2012	2:40:32 PM	H2 MFC set to  0.000000
12/6/2012	2:40:32 PM	BCl3 MFC set to  0.000000
12/6/2012	2:40:32 PM	PH3 MFC set to  0.000000
12/6/2012	2:40:32 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:40:32 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:40:32 PM	Tube furnace set to 150
12/6/2012	2:41:02 PM	Helium valve closed
12/6/2012	2:41:02 PM	H2 valve closed
12/6/2012	2:41:02 PM	BCl3 valve closed
12/6/2012	2:41:02 PM	PH3 valve closed
12/6/2012	2:41:02 PM	SiCl4 pre valve closed
12/6/2012	2:41:02 PM	SiCl4 post valve closed
12/6/2012	2:41:02 PM	Bypass valve closed
12/6/2012	2:41:02 PM	Bubbler valve closed
12/6/2012	2:41:02 PM	Main Vac valve opened
12/6/2012	2:41:02 PM	Helium MFC set to  0.000000
12/6/2012	2:41:02 PM	H2 MFC set to  0.000000
12/6/2012	2:41:02 PM	BCl3 MFC set to  0.000000
12/6/2012	2:41:02 PM	PH3 MFC set to  0.000000
12/6/2012	2:41:02 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:41:02 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:41:02 PM	Tube furnace set to 150
12/6/2012	2:41:32 PM	H2 valve closed
12/6/2012	2:41:32 PM	BCl3 valve closed
12/6/2012	2:41:32 PM	PH3 valve closed
12/6/2012	2:41:32 PM	SiCl4 pre valve closed
12/6/2012	2:41:32 PM	SiCl4 post valve closed
12/6/2012	2:41:32 PM	Bypass valve closed
12/6/2012	2:41:32 PM	Bubbler valve closed
12/6/2012	2:41:32 PM	Helium valve opened
12/6/2012	2:41:32 PM	Main Vac valve opened
12/6/2012	2:41:32 PM	Helium MFC set to  20.000000
12/6/2012	2:41:32 PM	H2 MFC set to  0.000000
12/6/2012	2:41:32 PM	BCl3 MFC set to  0.000000
12/6/2012	2:41:32 PM	PH3 MFC set to  0.000000
12/6/2012	2:41:32 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:41:32 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:41:32 PM	Tube furnace set to 150
12/6/2012	2:42:02 PM	Helium valve closed
12/6/2012	2:42:02 PM	H2 valve closed
12/6/2012	2:42:02 PM	BCl3 valve closed
12/6/2012	2:42:02 PM	PH3 valve closed
12/6/2012	2:42:02 PM	SiCl4 pre valve closed
12/6/2012	2:42:02 PM	SiCl4 post valve closed
12/6/2012	2:42:02 PM	Bypass valve closed
12/6/2012	2:42:02 PM	Bubbler valve closed
12/6/2012	2:42:02 PM	Main Vac valve opened
12/6/2012	2:42:02 PM	Helium MFC set to  0.000000
12/6/2012	2:42:02 PM	H2 MFC set to  0.000000
12/6/2012	2:42:02 PM	BCl3 MFC set to  0.000000
12/6/2012	2:42:02 PM	PH3 MFC set to  0.000000
12/6/2012	2:42:02 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:42:02 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:42:03 PM	Tube furnace set to 150
12/6/2012	2:42:33 PM	H2 valve closed
12/6/2012	2:42:33 PM	BCl3 valve closed
12/6/2012	2:42:33 PM	PH3 valve closed
12/6/2012	2:42:33 PM	SiCl4 pre valve closed
12/6/2012	2:42:33 PM	SiCl4 post valve closed
12/6/2012	2:42:33 PM	Bypass valve closed
12/6/2012	2:42:33 PM	Bubbler valve closed
12/6/2012	2:42:33 PM	Helium valve opened
12/6/2012	2:42:33 PM	Main Vac valve opened
12/6/2012	2:42:33 PM	Helium MFC set to  20.000000
12/6/2012	2:42:33 PM	H2 MFC set to  0.000000
12/6/2012	2:42:33 PM	BCl3 MFC set to  0.000000
12/6/2012	2:42:33 PM	PH3 MFC set to  0.000000
12/6/2012	2:42:33 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:42:33 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:42:33 PM	Tube furnace set to 150
12/6/2012	2:43:03 PM	Helium valve closed
12/6/2012	2:43:03 PM	H2 valve closed
12/6/2012	2:43:03 PM	BCl3 valve closed
12/6/2012	2:43:03 PM	PH3 valve closed
12/6/2012	2:43:03 PM	SiCl4 pre valve closed
12/6/2012	2:43:03 PM	SiCl4 post valve closed
12/6/2012	2:43:03 PM	Bypass valve closed
12/6/2012	2:43:03 PM	Bubbler valve closed
12/6/2012	2:43:03 PM	Main Vac valve opened
12/6/2012	2:43:03 PM	Helium MFC set to  0.000000
12/6/2012	2:43:03 PM	H2 MFC set to  0.000000
12/6/2012	2:43:03 PM	BCl3 MFC set to  0.000000
12/6/2012	2:43:03 PM	PH3 MFC set to  0.000000
12/6/2012	2:43:03 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:43:03 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:43:03 PM	Tube furnace set to 150
12/6/2012	2:43:04 PM	Run finished at 2:43 PM
12/6/2012	2:48:07 PM	Main Vac valve closed
12/6/2012	2:48:19 PM	Main Vac valve opened
12/6/2012	2:49:32 PM	Recipe started at 2:49 PM
12/6/2012	2:49:32 PM	Helium valve closed
12/6/2012	2:49:32 PM	H2 valve closed
12/6/2012	2:49:32 PM	BCl3 valve closed
12/6/2012	2:49:32 PM	PH3 valve closed
12/6/2012	2:49:32 PM	SiCl4 pre valve closed
12/6/2012	2:49:32 PM	SiCl4 post valve closed
12/6/2012	2:49:32 PM	Main Vac valve closed
12/6/2012	2:49:32 PM	Bypass valve closed
12/6/2012	2:49:32 PM	Bubbler valve closed
12/6/2012	2:49:32 PM	Helium MFC set to  0.000000
12/6/2012	2:49:32 PM	H2 MFC set to  0.000000
12/6/2012	2:49:32 PM	BCl3 MFC set to  0.000000
12/6/2012	2:49:32 PM	PH3 MFC set to  0.000000
12/6/2012	2:49:32 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:49:32 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:49:32 PM	Tube furnace set to 0
12/6/2012	2:49:35 PM	Helium valve closed
12/6/2012	2:49:35 PM	BCl3 valve closed
12/6/2012	2:49:35 PM	PH3 valve closed
12/6/2012	2:49:35 PM	SiCl4 pre valve closed
12/6/2012	2:49:35 PM	SiCl4 post valve closed
12/6/2012	2:49:35 PM	Main Vac valve closed
12/6/2012	2:49:35 PM	Bypass valve closed
12/6/2012	2:49:35 PM	Bubbler valve closed
12/6/2012	2:49:35 PM	H2 valve opened
12/6/2012	2:49:35 PM	Helium MFC set to  0.000000
12/6/2012	2:49:35 PM	H2 MFC set to  500.000000
12/6/2012	2:49:35 PM	BCl3 MFC set to  0.000000
12/6/2012	2:49:35 PM	PH3 MFC set to  0.000000
12/6/2012	2:49:35 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:49:35 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:49:35 PM	Tube furnace set to 0
12/6/2012	2:50:47 PM	Helium valve closed
12/6/2012	2:50:47 PM	BCl3 valve closed
12/6/2012	2:50:47 PM	PH3 valve closed
12/6/2012	2:50:47 PM	SiCl4 pre valve closed
12/6/2012	2:50:47 PM	SiCl4 post valve closed
12/6/2012	2:50:47 PM	Main Vac valve closed
12/6/2012	2:50:47 PM	Bypass valve closed
12/6/2012	2:50:47 PM	H2 valve opened
12/6/2012	2:50:47 PM	Bubbler valve opened
12/6/2012	2:50:47 PM	Helium MFC set to  0.000000
12/6/2012	2:50:47 PM	H2 MFC set to  500.000000
12/6/2012	2:50:47 PM	BCl3 MFC set to  0.000000
12/6/2012	2:50:47 PM	PH3 MFC set to  0.000000
12/6/2012	2:50:47 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:50:47 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:50:47 PM	Tube furnace set to 0
12/6/2012	2:50:49 PM	Helium valve closed
12/6/2012	2:50:49 PM	BCl3 valve closed
12/6/2012	2:50:49 PM	PH3 valve closed
12/6/2012	2:50:49 PM	SiCl4 pre valve closed
12/6/2012	2:50:49 PM	SiCl4 post valve closed
12/6/2012	2:50:49 PM	Main Vac valve closed
12/6/2012	2:50:49 PM	Bypass valve closed
12/6/2012	2:50:49 PM	H2 valve opened
12/6/2012	2:50:49 PM	Bubbler valve opened
12/6/2012	2:50:49 PM	Helium MFC set to  0.000000
12/6/2012	2:50:49 PM	H2 MFC set to  500.000000
12/6/2012	2:50:49 PM	BCl3 MFC set to  0.000000
12/6/2012	2:50:49 PM	PH3 MFC set to  0.000000
12/6/2012	2:50:49 PM	SiCl4 MFC set to  0.000000
12/6/2012	2:50:49 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	2:50:49 PM	Tube furnace set to 1000
12/6/2012	3:10:49 PM	Helium valve closed
12/6/2012	3:10:49 PM	PH3 valve closed
12/6/2012	3:10:49 PM	Main Vac valve closed
12/6/2012	3:10:49 PM	Bypass valve closed
12/6/2012	3:10:49 PM	H2 valve opened
12/6/2012	3:10:49 PM	BCl3 valve opened
12/6/2012	3:10:49 PM	SiCl4 pre valve opened
12/6/2012	3:10:49 PM	SiCl4 post valve opened
12/6/2012	3:10:49 PM	Bubbler valve opened
12/6/2012	3:10:49 PM	Helium MFC set to  0.000000
12/6/2012	3:10:49 PM	H2 MFC set to  450.000000
12/6/2012	3:10:49 PM	BCl3 MFC set to  1.300000
12/6/2012	3:10:49 PM	PH3 MFC set to  0.000000
12/6/2012	3:10:49 PM	SiCl4 MFC set to  50.000000
12/6/2012	3:10:49 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	3:10:49 PM	Tube furnace set to 1000
12/6/2012	3:28:49 PM	Helium valve closed
12/6/2012	3:28:49 PM	BCl3 valve closed
12/6/2012	3:28:49 PM	Main Vac valve closed
12/6/2012	3:28:49 PM	Bypass valve closed
12/6/2012	3:28:49 PM	H2 valve opened
12/6/2012	3:28:49 PM	PH3 valve opened
12/6/2012	3:28:49 PM	SiCl4 pre valve opened
12/6/2012	3:28:49 PM	SiCl4 post valve opened
12/6/2012	3:28:49 PM	Bubbler valve opened
12/6/2012	3:28:49 PM	Helium MFC set to  0.000000
12/6/2012	3:28:49 PM	H2 MFC set to  450.000000
12/6/2012	3:28:49 PM	BCl3 MFC set to  0.000000
12/6/2012	3:28:49 PM	PH3 MFC set to  20.000000
12/6/2012	3:28:49 PM	SiCl4 MFC set to  50.000000
12/6/2012	3:28:49 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	3:28:49 PM	Tube furnace set to 1000
12/6/2012	3:34:49 PM	Helium valve closed
12/6/2012	3:34:49 PM	BCl3 valve closed
12/6/2012	3:34:49 PM	PH3 valve closed
12/6/2012	3:34:49 PM	SiCl4 pre valve closed
12/6/2012	3:34:49 PM	SiCl4 post valve closed
12/6/2012	3:34:49 PM	Main Vac valve closed
12/6/2012	3:34:49 PM	Bypass valve closed
12/6/2012	3:34:49 PM	H2 valve opened
12/6/2012	3:34:49 PM	Bubbler valve opened
12/6/2012	3:34:49 PM	Helium MFC set to  0.000000
12/6/2012	3:34:49 PM	H2 MFC set to  500.000000
12/6/2012	3:34:49 PM	BCl3 MFC set to  0.000000
12/6/2012	3:34:49 PM	PH3 MFC set to  0.000000
12/6/2012	3:34:49 PM	SiCl4 MFC set to  0.000000
12/6/2012	3:34:49 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	3:34:49 PM	Tube furnace set to 950
12/6/2012	3:37:49 PM	Helium valve closed
12/6/2012	3:37:49 PM	BCl3 valve closed
12/6/2012	3:37:49 PM	PH3 valve closed
12/6/2012	3:37:49 PM	SiCl4 pre valve closed
12/6/2012	3:37:49 PM	SiCl4 post valve closed
12/6/2012	3:37:49 PM	Main Vac valve closed
12/6/2012	3:37:49 PM	Bypass valve closed
12/6/2012	3:37:49 PM	H2 valve opened
12/6/2012	3:37:49 PM	Bubbler valve opened
12/6/2012	3:37:49 PM	Helium MFC set to  0.000000
12/6/2012	3:37:49 PM	H2 MFC set to  500.000000
12/6/2012	3:37:49 PM	BCl3 MFC set to  0.000000
12/6/2012	3:37:49 PM	PH3 MFC set to  0.000000
12/6/2012	3:37:49 PM	SiCl4 MFC set to  0.000000
12/6/2012	3:37:49 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	3:37:50 PM	Tube furnace set to 900
12/6/2012	3:40:50 PM	Helium valve closed
12/6/2012	3:40:50 PM	BCl3 valve closed
12/6/2012	3:40:50 PM	PH3 valve closed
12/6/2012	3:40:50 PM	SiCl4 pre valve closed
12/6/2012	3:40:50 PM	SiCl4 post valve closed
12/6/2012	3:40:50 PM	Main Vac valve closed
12/6/2012	3:40:50 PM	Bypass valve closed
12/6/2012	3:40:50 PM	H2 valve opened
12/6/2012	3:40:50 PM	Bubbler valve opened
12/6/2012	3:40:50 PM	Helium MFC set to  0.000000
12/6/2012	3:40:50 PM	H2 MFC set to  500.000000
12/6/2012	3:40:50 PM	BCl3 MFC set to  0.000000
12/6/2012	3:40:50 PM	PH3 MFC set to  0.000000
12/6/2012	3:40:50 PM	SiCl4 MFC set to  0.000000
12/6/2012	3:40:50 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	3:40:50 PM	Tube furnace set to 850
12/6/2012	3:43:50 PM	Helium valve closed
12/6/2012	3:43:50 PM	BCl3 valve closed
12/6/2012	3:43:50 PM	PH3 valve closed
12/6/2012	3:43:50 PM	SiCl4 pre valve closed
12/6/2012	3:43:50 PM	SiCl4 post valve closed
12/6/2012	3:43:50 PM	Main Vac valve closed
12/6/2012	3:43:50 PM	Bypass valve closed
12/6/2012	3:43:50 PM	H2 valve opened
12/6/2012	3:43:50 PM	Bubbler valve opened
12/6/2012	3:43:50 PM	Helium MFC set to  0.000000
12/6/2012	3:43:50 PM	H2 MFC set to  500.000000
12/6/2012	3:43:50 PM	BCl3 MFC set to  0.000000
12/6/2012	3:43:50 PM	PH3 MFC set to  0.000000
12/6/2012	3:43:50 PM	SiCl4 MFC set to  0.000000
12/6/2012	3:43:50 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	3:43:50 PM	Tube furnace set to 800
12/6/2012	3:46:50 PM	Helium valve closed
12/6/2012	3:46:50 PM	BCl3 valve closed
12/6/2012	3:46:50 PM	PH3 valve closed
12/6/2012	3:46:50 PM	SiCl4 pre valve closed
12/6/2012	3:46:50 PM	SiCl4 post valve closed
12/6/2012	3:46:50 PM	Main Vac valve closed
12/6/2012	3:46:50 PM	Bypass valve closed
12/6/2012	3:46:50 PM	H2 valve opened
12/6/2012	3:46:50 PM	Bubbler valve opened
12/6/2012	3:46:50 PM	Helium MFC set to  0.000000
12/6/2012	3:46:50 PM	H2 MFC set to  500.000000
12/6/2012	3:46:50 PM	BCl3 MFC set to  0.000000
12/6/2012	3:46:50 PM	PH3 MFC set to  0.000000
12/6/2012	3:46:50 PM	SiCl4 MFC set to  0.000000
12/6/2012	3:46:50 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	3:46:50 PM	Tube furnace set to 750
12/6/2012	3:49:50 PM	H2 valve closed
12/6/2012	3:49:50 PM	BCl3 valve closed
12/6/2012	3:49:50 PM	PH3 valve closed
12/6/2012	3:49:50 PM	SiCl4 pre valve closed
12/6/2012	3:49:50 PM	SiCl4 post valve closed
12/6/2012	3:49:50 PM	Main Vac valve closed
12/6/2012	3:49:50 PM	Bypass valve closed
12/6/2012	3:49:50 PM	Helium valve opened
12/6/2012	3:49:50 PM	Bubbler valve opened
12/6/2012	3:49:50 PM	Helium MFC set to  500.000000
12/6/2012	3:49:50 PM	H2 MFC set to  0.000000
12/6/2012	3:49:50 PM	BCl3 MFC set to  0.000000
12/6/2012	3:49:50 PM	PH3 MFC set to  0.000000
12/6/2012	3:49:50 PM	SiCl4 MFC set to  0.000000
12/6/2012	3:49:50 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	3:49:51 PM	Tube furnace set to 0
12/6/2012	4:09:51 PM	Helium valve closed
12/6/2012	4:09:51 PM	H2 valve closed
12/6/2012	4:09:51 PM	BCl3 valve closed
12/6/2012	4:09:51 PM	PH3 valve closed
12/6/2012	4:09:51 PM	SiCl4 pre valve closed
12/6/2012	4:09:51 PM	SiCl4 post valve closed
12/6/2012	4:09:51 PM	Main Vac valve closed
12/6/2012	4:09:51 PM	Bypass valve closed
12/6/2012	4:09:51 PM	Bubbler valve closed
12/6/2012	4:09:51 PM	Helium MFC set to  0.000000
12/6/2012	4:09:51 PM	H2 MFC set to  0.000000
12/6/2012	4:09:51 PM	BCl3 MFC set to  0.000000
12/6/2012	4:09:51 PM	PH3 MFC set to  0.000000
12/6/2012	4:09:51 PM	SiCl4 MFC set to  0.000000
12/6/2012	4:09:51 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	4:09:51 PM	Tube furnace set to 0
12/6/2012	4:39:51 PM	Helium valve closed
12/6/2012	4:39:51 PM	H2 valve closed
12/6/2012	4:39:51 PM	BCl3 valve closed
12/6/2012	4:39:51 PM	PH3 valve closed
12/6/2012	4:39:51 PM	SiCl4 pre valve closed
12/6/2012	4:39:51 PM	SiCl4 post valve closed
12/6/2012	4:39:51 PM	Main Vac valve closed
12/6/2012	4:39:51 PM	Bubbler valve closed
12/6/2012	4:39:51 PM	Bypass valve opened
12/6/2012	4:39:51 PM	Helium MFC set to  0.000000
12/6/2012	4:39:51 PM	H2 MFC set to  0.000000
12/6/2012	4:39:51 PM	BCl3 MFC set to  0.000000
12/6/2012	4:39:51 PM	PH3 MFC set to  0.000000
12/6/2012	4:39:51 PM	SiCl4 MFC set to  0.000000
12/6/2012	4:39:51 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	4:39:51 PM	Tube furnace set to 0
12/6/2012	4:40:51 PM	Helium valve closed
12/6/2012	4:40:51 PM	H2 valve closed
12/6/2012	4:40:51 PM	BCl3 valve closed
12/6/2012	4:40:51 PM	PH3 valve closed
12/6/2012	4:40:51 PM	SiCl4 pre valve closed
12/6/2012	4:40:51 PM	SiCl4 post valve closed
12/6/2012	4:40:51 PM	Main Vac valve closed
12/6/2012	4:40:51 PM	Bubbler valve closed
12/6/2012	4:40:51 PM	Bypass valve opened
12/6/2012	4:40:51 PM	Helium MFC set to  0.000000
12/6/2012	4:40:51 PM	H2 MFC set to  0.000000
12/6/2012	4:40:51 PM	BCl3 MFC set to  0.000000
12/6/2012	4:40:51 PM	PH3 MFC set to  0.000000
12/6/2012	4:40:51 PM	SiCl4 MFC set to  0.000000
12/6/2012	4:40:51 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	4:40:52 PM	Tube furnace set to 0
12/6/2012	4:41:52 PM	Helium valve closed
12/6/2012	4:41:52 PM	H2 valve closed
12/6/2012	4:41:52 PM	BCl3 valve closed
12/6/2012	4:41:52 PM	PH3 valve closed
12/6/2012	4:41:52 PM	SiCl4 pre valve closed
12/6/2012	4:41:52 PM	SiCl4 post valve closed
12/6/2012	4:41:52 PM	Bypass valve closed
12/6/2012	4:41:52 PM	Bubbler valve closed
12/6/2012	4:41:52 PM	Main Vac valve opened
12/6/2012	4:41:52 PM	Helium MFC set to  0.000000
12/6/2012	4:41:52 PM	H2 MFC set to  0.000000
12/6/2012	4:41:52 PM	BCl3 MFC set to  0.000000
12/6/2012	4:41:52 PM	PH3 MFC set to  0.000000
12/6/2012	4:41:52 PM	SiCl4 MFC set to  0.000000
12/6/2012	4:41:52 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	4:41:52 PM	Tube furnace set to 0
12/6/2012	4:41:53 PM	Run finished at 4:41 PM
12/6/2012	5:01:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2012	5:01:05 PM	Recipe started at 5:01 PM
12/6/2012	5:01:05 PM	Helium valve closed
12/6/2012	5:01:05 PM	H2 valve closed
12/6/2012	5:01:05 PM	BCl3 valve closed
12/6/2012	5:01:05 PM	PH3 valve closed
12/6/2012	5:01:05 PM	SiCl4 pre valve closed
12/6/2012	5:01:05 PM	SiCl4 post valve closed
12/6/2012	5:01:05 PM	Main Vac valve closed
12/6/2012	5:01:05 PM	Bypass valve closed
12/6/2012	5:01:05 PM	Bubbler valve closed
12/6/2012	5:01:05 PM	Helium MFC set to  0.000000
12/6/2012	5:01:05 PM	H2 MFC set to  0.000000
12/6/2012	5:01:05 PM	BCl3 MFC set to  0.000000
12/6/2012	5:01:05 PM	PH3 MFC set to  0.000000
12/6/2012	5:01:05 PM	SiCl4 MFC set to  0.000000
12/6/2012	5:01:05 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	5:01:06 PM	Tube furnace set to 0
12/6/2012	5:01:09 PM	H2 valve closed
12/6/2012	5:01:09 PM	BCl3 valve closed
12/6/2012	5:01:09 PM	PH3 valve closed
12/6/2012	5:01:09 PM	SiCl4 pre valve closed
12/6/2012	5:01:09 PM	SiCl4 post valve closed
12/6/2012	5:01:09 PM	Main Vac valve closed
12/6/2012	5:01:09 PM	Bypass valve closed
12/6/2012	5:01:09 PM	Bubbler valve closed
12/6/2012	5:01:09 PM	Helium valve opened
12/6/2012	5:01:09 PM	Helium MFC set to  500.000000
12/6/2012	5:01:09 PM	H2 MFC set to  0.000000
12/6/2012	5:01:09 PM	BCl3 MFC set to  0.000000
12/6/2012	5:01:09 PM	PH3 MFC set to  0.000000
12/6/2012	5:01:09 PM	SiCl4 MFC set to  0.000000
12/6/2012	5:01:09 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	5:01:09 PM	Tube furnace set to 0
12/6/2012	5:02:15 PM	Helium valve closed
12/6/2012	5:02:15 PM	H2 valve closed
12/6/2012	5:02:15 PM	BCl3 valve closed
12/6/2012	5:02:15 PM	PH3 valve closed
12/6/2012	5:02:15 PM	SiCl4 pre valve closed
12/6/2012	5:02:15 PM	SiCl4 post valve closed
12/6/2012	5:02:15 PM	Main Vac valve closed
12/6/2012	5:02:15 PM	Bypass valve closed
12/6/2012	5:02:15 PM	Bubbler valve closed
12/6/2012	5:02:15 PM	Helium MFC set to  0.000000
12/6/2012	5:02:15 PM	H2 MFC set to  0.000000
12/6/2012	5:02:15 PM	BCl3 MFC set to  0.000000
12/6/2012	5:02:15 PM	PH3 MFC set to  0.000000
12/6/2012	5:02:15 PM	SiCl4 MFC set to  0.000000
12/6/2012	5:02:15 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	5:02:15 PM	Tube furnace set to 0
12/6/2012	5:02:16 PM	Run finished at 5:02 PM
12/6/2012	5:02:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2012	5:08:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/6/2012	5:08:38 PM	Recipe started at 5:08 PM
12/6/2012	5:08:38 PM	Helium valve closed
12/6/2012	5:08:38 PM	H2 valve closed
12/6/2012	5:08:38 PM	BCl3 valve closed
12/6/2012	5:08:38 PM	PH3 valve closed
12/6/2012	5:08:38 PM	SiCl4 pre valve closed
12/6/2012	5:08:38 PM	SiCl4 post valve closed
12/6/2012	5:08:38 PM	Main Vac valve closed
12/6/2012	5:08:38 PM	Bubbler valve closed
12/6/2012	5:08:39 PM	Bypass valve opened
12/6/2012	5:08:39 PM	Helium MFC set to  0.000000
12/6/2012	5:08:39 PM	H2 MFC set to  0.000000
12/6/2012	5:08:39 PM	BCl3 MFC set to  0.000000
12/6/2012	5:08:39 PM	PH3 MFC set to  0.000000
12/6/2012	5:08:39 PM	SiCl4 MFC set to  0.000000
12/6/2012	5:08:39 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	5:08:39 PM	Tube furnace set to 0
12/6/2012	5:10:02 PM	Helium valve closed
12/6/2012	5:10:02 PM	H2 valve closed
12/6/2012	5:10:02 PM	BCl3 valve closed
12/6/2012	5:10:02 PM	PH3 valve closed
12/6/2012	5:10:02 PM	SiCl4 pre valve closed
12/6/2012	5:10:02 PM	SiCl4 post valve closed
12/6/2012	5:10:02 PM	Main Vac valve closed
12/6/2012	5:10:02 PM	Bubbler valve closed
12/6/2012	5:10:02 PM	Bypass valve opened
12/6/2012	5:10:02 PM	Helium MFC set to  0.000000
12/6/2012	5:10:02 PM	H2 MFC set to  0.000000
12/6/2012	5:10:02 PM	BCl3 MFC set to  0.000000
12/6/2012	5:10:02 PM	PH3 MFC set to  0.000000
12/6/2012	5:10:02 PM	SiCl4 MFC set to  0.000000
12/6/2012	5:10:02 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	5:10:02 PM	Tube furnace set to 0
12/6/2012	5:10:43 PM	Helium valve closed
12/6/2012	5:10:43 PM	H2 valve closed
12/6/2012	5:10:43 PM	BCl3 valve closed
12/6/2012	5:10:43 PM	PH3 valve closed
12/6/2012	5:10:43 PM	SiCl4 pre valve closed
12/6/2012	5:10:43 PM	SiCl4 post valve closed
12/6/2012	5:10:43 PM	Bypass valve closed
12/6/2012	5:10:43 PM	Bubbler valve closed
12/6/2012	5:10:43 PM	Main Vac valve opened
12/6/2012	5:10:43 PM	Helium MFC set to  0.000000
12/6/2012	5:10:43 PM	H2 MFC set to  0.000000
12/6/2012	5:10:43 PM	BCl3 MFC set to  0.000000
12/6/2012	5:10:43 PM	PH3 MFC set to  0.000000
12/6/2012	5:10:44 PM	SiCl4 MFC set to  0.000000
12/6/2012	5:10:44 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	5:10:44 PM	Tube furnace set to 0
12/6/2012	5:10:45 PM	Run finished at 5:10 PM
12/6/2012	5:10:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/6/2012	5:10:48 PM	Tube furnace set to 150
12/6/2012	5:55:04 PM	Recipe started at 5:55 PM
12/6/2012	5:55:04 PM	Helium valve closed
12/6/2012	5:55:04 PM	H2 valve closed
12/6/2012	5:55:04 PM	BCl3 valve closed
12/6/2012	5:55:04 PM	PH3 valve closed
12/6/2012	5:55:04 PM	SiCl4 pre valve closed
12/6/2012	5:55:04 PM	SiCl4 post valve closed
12/6/2012	5:55:04 PM	Bypass valve closed
12/6/2012	5:55:04 PM	Bubbler valve closed
12/6/2012	5:55:04 PM	Main Vac valve opened
12/6/2012	5:55:04 PM	Helium MFC set to  0.000000
12/6/2012	5:55:04 PM	H2 MFC set to  0.000000
12/6/2012	5:55:04 PM	BCl3 MFC set to  0.000000
12/6/2012	5:55:04 PM	PH3 MFC set to  0.000000
12/6/2012	5:55:04 PM	SiCl4 MFC set to  0.000000
12/6/2012	5:55:04 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	5:55:04 PM	Tube furnace set to 0
12/6/2012	5:55:11 PM	Helium valve closed
12/6/2012	5:55:11 PM	H2 valve closed
12/6/2012	5:55:11 PM	BCl3 valve closed
12/6/2012	5:55:11 PM	PH3 valve closed
12/6/2012	5:55:11 PM	SiCl4 pre valve closed
12/6/2012	5:55:11 PM	SiCl4 post valve closed
12/6/2012	5:55:11 PM	Main Vac valve closed
12/6/2012	5:55:11 PM	Bypass valve closed
12/6/2012	5:55:11 PM	Bubbler valve closed
12/6/2012	5:55:11 PM	Helium MFC set to  0.000000
12/6/2012	5:55:11 PM	H2 MFC set to  0.000000
12/6/2012	5:55:11 PM	BCl3 MFC set to  0.000000
12/6/2012	5:55:11 PM	PH3 MFC set to  0.000000
12/6/2012	5:55:11 PM	SiCl4 MFC set to  0.000000
12/6/2012	5:55:11 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	5:55:11 PM	Tube furnace set to 0
12/6/2012	5:55:14 PM	Run aborted at 5:55 PM
12/6/2012	5:55:14 PM	Helium valve closed
12/6/2012	5:55:14 PM	H2 valve closed
12/6/2012	5:55:14 PM	BCl3 valve closed
12/6/2012	5:55:14 PM	PH3 valve closed
12/6/2012	5:55:14 PM	SiCl4 pre valve closed
12/6/2012	5:55:14 PM	SiCl4 post valve closed
12/6/2012	5:55:14 PM	Bypass valve closed
12/6/2012	5:55:14 PM	Main Vac valve closed
12/6/2012	5:55:14 PM	Bubbler valve closed
12/6/2012	5:55:14 PM	Helium MFC set to  0.000000
12/6/2012	5:55:14 PM	H2 MFC set to  0.000000
12/6/2012	5:55:14 PM	BCl3 MFC set to  0.000000
12/6/2012	5:55:14 PM	PH3 MFC set to  0.000000
12/6/2012	5:55:14 PM	SiCl4 MFC set to  0.000000
12/6/2012	5:55:14 PM	Tube furnace set to 0
12/6/2012	5:55:16 PM	Main Vac valve opened
12/6/2012	5:56:05 PM	Recipe started at 5:56 PM
12/6/2012	5:56:05 PM	Helium valve closed
12/6/2012	5:56:05 PM	H2 valve closed
12/6/2012	5:56:05 PM	BCl3 valve closed
12/6/2012	5:56:05 PM	PH3 valve closed
12/6/2012	5:56:05 PM	SiCl4 pre valve closed
12/6/2012	5:56:05 PM	SiCl4 post valve closed
12/6/2012	5:56:05 PM	Bypass valve closed
12/6/2012	5:56:05 PM	Bubbler valve closed
12/6/2012	5:56:05 PM	Main Vac valve opened
12/6/2012	5:56:05 PM	Helium MFC set to  0.000000
12/6/2012	5:56:05 PM	H2 MFC set to  0.000000
12/6/2012	5:56:05 PM	BCl3 MFC set to  0.000000
12/6/2012	5:56:05 PM	PH3 MFC set to  0.000000
12/6/2012	5:56:05 PM	SiCl4 MFC set to  0.000000
12/6/2012	5:56:05 PM	Bypass solenoid MFC set to  0.000000
12/6/2012	5:56:05 PM	Tube furnace set to 150
